To solar cell, LCD, and LED production factories, as well as universities and research institutions conducting research! It can be used for semiconductor applications.
The "ER-1HL・ER-1LL" is a pressure regulator suitable for semiconductor applications. In manufacturing, we implement "clean room assembly," "high-performance cleaning," and "100% He leak testing" to meet high levels of cleanliness, airtightness, and reliability. The He leak test is conducted according to the SEMI F01 method and meets the standards. 【ER-1HL Specifications (Excerpt)】 ■ Primary pressure measurement (MPa): 2–15 ■ Secondary side operating pressure (MPa): 0.1–0.99 ■ Operating temperature (°C): -5–40 (design temperature -10–75°C) ■ Diameter: 1/4 ■ Weight (kg): 1.3 ■ Built-in filter filtration degree: 5μm *For more details, please refer to the PDF document or feel free to contact us.
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【ER-1LL Specifications (Excerpt)】 ■ Primary measurement pressure (MPa): 1–5 ■ Secondary side operating pressure (MPa): 0.1–0.99 ■ Operating temperature (°C): -5–40 (design temperature -10–75°C) ■ Diameter: 1/4 ■ Weight (kg): 1.1 ■ Built-in filter filtration degree: 20μm *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Yamato Sangyo Co., Ltd. is a company located in Osaka City, Osaka Prefecture, that manufactures and sells pressure control equipment. The products handled include pressure reducing valves, pressure regulators, gas-related products, general industrial pressure regulators, analytical instrument pressure regulators, gas supply units, gas supply facility plant design and construction, and a wide range of other items. From beer foam to rockets and fuel cells, cutting-edge technology is alive and well in Japan's leading industries.
