It is a device that can be transitioned from a pilot line to a mass production line.
This is a deposition-up horizontal inline sputtering device equipped with RAM cathodes (four-sided opposing low-damage sputtering cathodes) and strong magnetic field planar cathodes. To avoid damaging the underlying layer, the initial layer is deposited using low-damage sputtering with the RAM cathode. After that, high-speed deposition is performed with the strong magnetic field cathode. Each of the load lock stockers and unload lock stockers is vacuum-stored with 15 trays each. *For more details, please refer to the PDF document or feel free to contact us.*
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basic information
Max. Sub. Size: 200mm x 300mm x t0.2mm Number of substrates per tray: 2 Tray size: 350mm x 1000mm x 20mm Effective deposition width: 620mm *For more details, please refer to the PDF document or feel free to contact us.*
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For more details, please refer to the PDF document or feel free to contact us.
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Keihin Ramtech was founded in 1972 and has become a trusted manufacturer in the LCD and semiconductor manufacturing equipment industry as well as the automotive industry. At our company, we believe that continuous technological development is the responsibility of all employees. The unique technologies possessed by Keihin Ramtech are utilized as core technologies across various industries. As a proposer that continues to develop and propose innovative technologies expected to further advance in the future, we will contribute to our customers' further development.