Compact yet high-performance. Compatible with a wide range of processes.
The performance of the hot plate is a crucial factor that determines the accuracy of the photolithography process. In particular, in advanced processes that require high uniformity of film thickness, line width, and film quality, as well as in process development involving materials with high temperature dependence, the performance of the hot plate becomes a significant factor in assessing process performance. The timer-controlled pin-up mechanism enables precise time management, allowing for uniform thermal treatment between wafers. In addition to the standard 250°C model, a high-temperature 350°C model is also available. Furthermore, if uniform cooling is required before and after processing, a tabletop cool plate can also be utilized. 【Features】 ■ High precision in in-plane temperature uniformity. ■ Timer control reduces wafer-to-wafer variation. ■ Compatible with 3 to 8-inch wafers. ■ Proximity balls ensure a uniform gap. ■ The high-temperature 350°C model is equipped with a burn prevention cover. ■ Tabletop cool plates with air cooling and water cooling are also available. *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Common Specifications】 ■ Tabletop Hot Plate <Standard 250°C Model> Temperature Range: Up to 250°C Work Size: 3 to 8 inches Dimensions: Width 300 × Depth 350 × Height 300 mm Timer Control: Two levels (upper and lower) via pin-up Mica Heater: AC 100 V 600 W Round Type: φ216 mm <High-Temperature 350°C Model> Temperature Range: Up to 350°C Work Size: 3 to 8 inches Dimensions: Width 320 × Depth 361 × Height 334 mm Timer Control: Two levels (upper and lower) via pin-up Mica Heater: AC 100 V 600 W Round Type: φ216 mm ■ Tabletop Cool Plate Compatible with air cooling and water cooling *Compatible at this temperature Work Size: 3 to 8 inches Dimensions: Width 300 × Depth 350 × Height 300 mm Timer Control: Two levels (upper and lower) via pin-up Round Type: φ220 mm *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Process development for semiconductor factories ■ Material development for semiconductor material manufacturers ■ Small lot production in semiconductor factories *For more details, please refer to the PDF document or feel free to contact us.
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Company information
SCREEN SPE Service Co., Ltd. was established in 2003 as a group company of SCREEN Holdings Co., Ltd. We are a professional technical team that provides a wide range of technical services, from setup, maintenance, and modification services for semiconductor manufacturing equipment to the development and sales of original peripheral devices. Our policy is "Customer First." Through advanced technological capabilities and know-how, we contribute to the stable operation of our customers' production lines.