Nano Incoater (NIC-1510) with interchangeable tank + ultrasonic cleaning tank included
NIC-1510
Up to three types of coating liquids can be applied to a wafer or metal plate with a diameter of φ250 to φ300.
This device is capable of applying up to three types of coating liquids on wafers or metal plates with diameters ranging from φ250 to φ300. Additionally, each tank is easy to replace, making it suitable for applying and evaluating many different coating liquids. An ultrasonic cleaning tank has been installed in the first chamber, allowing for operations such as cleaning, coating, and rinsing.
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basic information
【Main Specifications】 1. Stroke: 320mm 2. Target Size: φ250 t0.3 3. Target Material: Wafer, metal plate 4. Dip Speed: 0.1mm/sec to 60mm/sec 5. Coating Liquid Circulation: None 6. Coating Liquid Temperature Control: None 7. Filter Mesh: None 8. Drying Section: None 9. Drying Temperature: None 10. HEPA Unit: None 11. Equipment Size (Approx.): W:1100×D:975×H:1410mm
Price range
P6
Delivery Time
Applications/Examples of results
Wafers and metal plates with diameters of φ250 to φ300 can have up to three types of coating liquids applied. Additionally, each tank is easy to replace, making it suitable for applying and evaluating many different coating liquids. An ultrasonic cleaning tank has been installed in the first chamber, allowing for operations such as cleaning, coating, and rinsing.
Line up（18）
| Model number | overview |
|---|---|
| NIC-1106 | A desktop model that achieves high-precision and stable release agent application for small-sized substrates. |
| NIC-1103 | 6 to 8 inch board compatible, versatile medium-sized nano coater. |
| NIC-0809 | Optimal for φ200mm substrates, a nano coater that supports a wide range of research and development. |
| NIC-1109G | Box-integrated design that achieves high-precision coating in an inert gas environment. |
| NIC-1208 | High-power model compatible with 600mm square substrates, achieving uniform coating of large samples. |
| NIC-1410-S1 | High-precision dip coater for small cubic samples, compatible with thicknesses up to 1.5mm. |
| NIC-1308 | Dedicated nano coater compatible with roll materials, capable of continuous coating. |
| DT-1104 | A dedicated device for achieving uniform coating on disk media. |
| MD-1501-S1 | Dip coating device with a circulation mechanism that enhances liquid stability and has high chemical resistance. |
| SA-1109 | High-precision cleaning of substrates and samples is possible with ultrasonic cleaning. |
| SA-1202 | An efficient cleaning and drying integrated device that combines warm water drying. |
| NIC-1510 | A high-performance model that balances tank replacement and cleaning, accommodating multiple uses. |
| MD-1802 | High-efficiency model that enables multilayer film formation and continuous processing with an 8-slot configuration. |
| LD-1811 | Linear type that achieves oxidation prevention and stable film formation with nitrogen purge. |
| NIC-2003 | Supports a maximum stroke of 1.3m, an ideal model for handling large circuit boards. |
| DT-1812 | Ideal for continuous process handling, flexible support for various prototypes with an 8-tank system. |
| DT-2002 | Specialized dip coater for cylindrical materials, compatible with diameters of 20 to 60 mm. |
| NIC-2409 | Nano coater for large cylindrical materials compatible with Φ200〜700mm sleeves. |
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