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  6. Application of mini CORI-FLOW (Pump System Case 1)

Application of mini CORI-FLOW (Pump System Case 1)

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Application of mini CORI-FLOW (Pump System Case 1)

last updated:Jun 09, 2022

ブロンコスト・ジャパン
ブロンコスト・ジャパン
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[Pump System Case 1] Gas or Liquid Precursor Delivery

In the vapor deposition process, various precursor fluids (regardless of whether they are gases or liquids) must be precisely controlled. The "mini CORI-FLOW(R) series high-precision mass flow controllers" are particularly well-suited for these demanding applications. Thanks to the "multi-range" feature, OEM customers do not need to maintain numerous types of instruments. This device allows for easy range changes, thereby providing a cost of ownership advantage. [Application Examples] - Applying mini CORI-FLOW(R) to additive dosing → Enables the easy construction of a compact and autonomous system. - Applying mini CORI-FLOW(R) to batch counters → Provides high precision, high speed, high repeatability, and a compact batch and dosing system. For more details, please contact us or download the catalog.

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Application of mini CORI-FLOW (Pump System Case 1)

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  • Related Link - https://www.bronkhorst.com/ja-jp/products-jp/liqui…

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【Application Examples】 [Application to Additive Distribution] ○ The master flow meter connected to FLOW-BUS (Broncost's field bus) measures the main fluid. ○ The slave instrument, preset to follow the master at a certain ratio, is also connected to FLOW-BUS. ○ When the main fluid changes, the slave instrument receives the changed output signal from the master via FLOW-BUS and follows accordingly. ○ The slave instrument recalculates its set values. ○ The PID controller of the slave instrument operates based on the new set values and supplies control signals to the pump driver. ○ As a result, the pump's rotation speed is controlled to regulate the flow rate of the additive to the new set value. [Application to Batch Counter] ○ Mass is measured, and the built-in PID controller drives the proportional valve. ○ External inputs are made to the analog input or digital interface (RS232 or field bus). ○ The desired batch amount is programmed as a limit value in the built-in counter. ○ When the counter reaches the limit value (batch), the valve is closed until the next reset. ● For more details, please contact us or download the catalog.

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Application of mini CORI-FLOW (Pump System Case 1)

Application of mini CORI-FLOW (Pump System Case 1)

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mini CORI-FLOW Coriolis mass flow meter/controller M15

mini CORI-FLOW Coriolis mass flow meter/controller M15

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Mini CORI-FLOW Compact Coriolis Mass Flow Meter/Controller M12/M13/M14

Mini CORI-FLOW Compact Coriolis Mass Flow Meter/Controller M12/M13/M14

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Mini CORI-FLOW Coriolis Mass Flow Meter/Controller ML120

Mini CORI-FLOW Coriolis Mass Flow Meter/Controller ML120

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mini CORI-FLOW ML120 Coriolis Mass Flow Controller

Exhibition at SEMICON Japan 2017

  • Seminar・Event

Bronkhorst Japan will be exhibiting the following Coriolis mass flow meters and mass flow controllers at SEMICON JAPAN 2017, in a space provided by the Netherlands Embassy within "the Holland Hightech Pavilion." - mini CORI-FLOW ML120 For ultra-low flow rates (0.05...5 g/h to 2...200 g/h) - mini CORI-FLOW M12/M13/M14 For low flow rates (0.1...5 g/h to 0.3...30 kg/h) - mini CORI-FLOW M15 (catalog only) For small flow rates (0.2...5 kg/h to 3...300 kg/h) - CORI-FLOW M54/M55 (catalog only) For small flow rates (0.2...5 kg/h to 6...600 kg/h) If you are looking for equipment for measuring and controlling low flow rates, please stop by our booth.

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Holland Hightech Pavillion booth 1612

SEMICON Japan 2017

  • Seminar・Event

Broncoast Japan will have a space within the "Holland Hightech Pavilion" at the Dutch Embassy, where we will showcase the Coriolis mass flow meter and mass flow controller "mini CORI-FLOW" designed for micro flow applications. It is capable of measuring and controlling a minimum of 0.05...5 g/h, and we are seeing an increasing number of cases where it is selected as a replacement for thermal mass flow meters and controllers for liquids. There are also cases of it replacing thermal mass flow meters and controllers for gases. If you are using flow measurement and control equipment or are having difficulties with measuring and controlling micro flows, please feel free to stop by.

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Exhibited at the 16th Nanotechnology Conference.

  • Seminar・Event

Bronco St. Japan will exhibit at the 16th Nano Society Conference. ■ Overview of the Nano Society The Nano Society was established in 2002, evolving from the Ultra-Fine Particles and Clusters Discussion Group (founded in 1997) with the aim of becoming a comprehensive society for nanoscience and nanotechnology in Japan. Since the inaugural conference of the Nano Society was held in Kobe in 2003, approximately 400 participants have attended each conference held in various locations across Japan. The Nano Society is composed of three divisions: "Nano Structures and Properties," "Nano Functions and Applications," and "Nano Bio and Medicine," providing members with opportunities to share specialized knowledge and exchange cutting-edge information through symposiums and other events. We will showcase innovative mass flow meters/mass flow controllers for gases and liquids.

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Participation in the 121st Catalysis Discussion Meeting.

  • Seminar・Event

Bronco St. Japan will exhibit at the 121st Catalysis Discussion Meeting. ■ Dates: March 22 (Thursday) to March 23 (Friday), 2018 ■ Venue: The University of Tokyo, College of Arts and Sciences (Komaba Campus, Building 13 and 21KOMCEE) ■ How to register: Registration will be available on the day only. No prior registration is necessary. Please come to the general registration desk for the discussion meeting. We will showcase innovative mass flow meters/mass flow controllers for gases and liquids.

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Companynews list (24)

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ブロンコスト・ジャパン

ブロンコスト・ジャパン

Facility Design Office

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Since 1981, Bronkhorst High-Tech B.V. has continued to provide a wide range of products in the field of thermal and Coriolis mass flow meters/controllers. Numerous types of standard or customized measuring instruments are available for use in R&D, various industrial sectors, or applications in hazardous locations.

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