Alinea, which excels in productivity and usability, features automatic microscope movement and more.
This is a manual exposure device compatible with 2-inch wafers. It is an exposure device where the operator manually sets the wafer. Using a 4-inch glass mask, the alignment marks of the photomask and the wafer are imaged through a microscope, allowing for alignment and exposure gap settings while viewing the displayed image on a monitor. Additionally, when the exposure switch is pressed, the microscope automatically retracts, the lamp house moves to the designated position, and the exposure is performed with the set light intensity, followed by automatic retraction.
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basic information
Main Features 1. The parallel alignment of the photomask and wafer employs a method that levitates the wafer table using a layer of air and makes precise contact with the photomask through an air spring built into the alignment mechanism. 2. The alignment microscope can be freely moved for easy searching of alignment marks (with a locking mechanism). 3. The alignment microscope is a high-magnification zoom type and is equipped with LED lighting that allows for color selection based on the resist. 4. To enhance the work pace, the lamp house and alignment microscope automatically insert and retract, thereby improving productivity.
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Applications/Examples of results
Electronics field ●Microdevices - Semiconductors, various devices, sensors (photolithography processes for wafers, glass substrates, etc.) ●LED
Detailed information
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Main features of the product: Left photo: A microscope that can be freely moved for easy searching of alignment marks. Center photo: An alignment microscope with a locking mechanism. Right photo: Equipped with LED lighting that allows color selection based on the resist.
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Company information
For over half a century, we have continuously refined our technological and product capabilities. By integrating Ushio's unique proposal power with these strengths, we provide solutions that pave the way for the next generation to society and the market. In the business domain of light and industry, where further evolution is anticipated, we will maximize all our capabilities to contribute to the development of our customers and society.