Porous ceramics are ceramics that have many pores.
At Asuzak Corporation's Fine Ceramics Division, we have started working with porous ceramics, offering two types of materials: porous alumina and porous SiC. Currently, we have several product lines available to meet your needs based on different applications. We propose porous ceramics with customizable pore diameters and porosity thanks to our unique molding technology. Porous ceramics are used as adsorption tools for thin wafers and thin films. They allow gas to pass through but not plasma, making them suitable as fixtures for plasma equipment. Due to their porous nature, these ceramics possess insulation and heat resistance. Depending on the size, we can achieve a flatness of about 5μm, enabling high precision in equipment. How about this application? In addition to general porous alumina ceramics, we also handle porous ceramics made of SiC, which can be considered for environments where alumina cannot be used (such as rapid cooling, rapid heating, and the use of hydrofluoric acid-based chemicals). How about using them in the manufacturing of optical lenses that require rapid cooling and heating?
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Among porous ceramics, we offer alumina materials 【AZP60】, 【AZPW40】, 【AZPW45】, and SiC material 【AZPS40】, differentiated by their porosity. Please choose according to your application. ◆ Features of Porous Ceramics ● Material: High purity alumina (purity 99.6%), silicon carbide (SiC) ● Low thermal conductivity ● Low dielectric constant ● Capable of producing complex shapes such as screw machining (tapping, bushings, inserts) ● Porosity can be adjusted ◆ Applications of Porous Ceramics Examples of products: Chucks using porous ceramics ● Porous vacuum ceramic chucks ● Lightweight components (specific gravity: lighter than aluminum) ● Insulation plates ● Adsorption plates ● Materials to prevent film peeling in film deposition devices ● Applications as low dielectric materials ◆ Types of Porous Ceramics We offer several types of porous ceramics due to differences in manufacturing methods. Please choose according to your needs. The higher the number of pores, the higher the porosity, making it easier for air to pass through. Since the porosity can be adjusted, please consult us separately.
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※The delivery date may vary depending on your inquiry, so please feel free to contact us.
Applications/Examples of results
● Porous vacuum ceramic chuck ● Lightweight components (specific gravity: lighter than aluminum) ● Insulation plate ● Adsorption plate ● Film peeling prevention components for film deposition devices ● Applications as a low dielectric material
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Company information
At Asuzac Co., Ltd., Fine Ceramics Division, ● We can manufacture top-class large alumina plates. ◇ We can handle everything from material sales to processing into desired shapes for alumina plates over 3 meters in length! ● With top-level processing technology, we can produce silicon carbide (SiC) in a short delivery time. ◇ We also offer high-purity products and can handle mass production. We are particularly skilled in plate shapes! ● We can accommodate small lots and single items as well. ◇ We also provide VE and VA proposals! We are engaged in the development, manufacturing, processing, and sales of fine ceramics (various ceramics such as alumina, silicon carbide SiC, zirconia, low thermal conductivity ceramic Alusima, black alumina, porous alumina, etc.). For more information, please visit our corporate website (http://www.asuzac-ceramics.jp/).