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At Asuzak Corporation's Fine Ceramics Division, we have started working with porous ceramics, offering two types of materials: porous alumina and porous SiC. Currently, we have several product lines available to meet your needs based on different applications. We propose porous ceramics with customizable pore diameters and porosity thanks to our unique molding technology. Porous ceramics are used as adsorption tools for thin wafers and thin films. They allow gas to pass through but not plasma, making them suitable as fixtures for plasma equipment. Due to their porous nature, these ceramics possess insulation and heat resistance. Depending on the size, we can achieve a flatness of about 5μm, enabling high precision in equipment. How about this application? In addition to general porous alumina ceramics, we also handle porous ceramics made of SiC, which can be considered for environments where alumina cannot be used (such as rapid cooling, rapid heating, and the use of hydrofluoric acid-based chemicals). How about using them in the manufacturing of optical lenses that require rapid cooling and heating?

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Due to its high hardness, it also possesses strong resistance to sliding wear. It also has a high thermal conductivity. Silicon carbide (SiC) is used in internal components of semiconductor manufacturing equipment and LED manufacturing equipment, as well as in substrate trays for etching devices and firing jigs (such as for capacitors). Silicon carbide (SiC) takes advantage of its heat resistance (even over 1,000 degrees), chemical resistance (plasma resistance), good wear resistance, thermal conductivity, density, and strength. How about this usage? Since thin products can be made with SiC, please consider using it as trays or setters for better thermal efficiency. It is possible to use thin SiC plates for setters in firing furnaces for electronic substrates.

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At Asuzac, we offer a variety of high-purity, high-performance grades of alumina ceramics. We also sell alumina plates online. (http://www.asuzac-ceramics.jp/shop/shopenter.htm) Alumina is used in internal components of chambers for semiconductor manufacturing equipment and liquid crystal manufacturing equipment, as well as in transport arms. Due to its high electrical insulation properties (1015Ωcm), alumina serves as an insulating component within chambers. The transport arms can be made thinner because alumina has greater bending strength compared to metals and resins, making warping less likely. How about using it this way? We can provide large alumina products (including those over 3 meters) and hollow ceramics (with tunnel shapes without adhesives), making it suitable for large ceramics in semiconductor Φ450 wafer manufacturing equipment and liquid crystal G10 glass substrate manufacturing equipment.

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