★☆★☆ MiniLab Series Flexible Thin Film Experimental Device ★☆★☆

The MiniLab thin film experimental device allows for the construction of a compact system that minimizes waste by incorporating the optimal components and control modules according to the required deposition method and material from a wide range of options, making it semi-custom made. By equipping a modular control unit with a Plug & Play feel, the application range expands, enabling various thin film process experiments.
【MiniLab Thin Film Experimental Device Configuration Modules】
◎ Manufacturing Range
Resistance heating evaporation (TE), organic evaporation (LTE), electron beam evaporation (EB), sputtering (SP), CVD, dry etching
【Small Footprint & Space-Saving】
- Single rack type (026): 590(W) x 590(D) mm
- Dual rack type (060): 1200(W) x 590(D) mm
- Triple rack type (125): 1770(W) x 755(D) mm
【Excellent Operability & Intuitive Operation Screen】
Windows PC or 7” touch panel. Easy operation that does not require advanced skills, with maximum consideration for safety. All operations except for internal component adjustments and material exchanges in the chamber are performed via the PC/HMI screen.


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Due to its modular design, it is possible to assemble a dedicated machine tailored to your desired film type and process. A flexible, compact experimental device that can accommodate various applications.