★nano BenchTop Series Thin Film Experiment Device★

Equipped with various conditions necessary to create high uniformity "high-quality" thin films required in research and development settings. The nano series is a high-performance device that condenses functionality into a compact body. It employs a robust and highly airtight stainless steel chamber that ensures a high vacuum environment and sufficient T/S adjustment distance, which are essential elements for low-defect and high-quality film formation. Additionally, all models share the IntelliDep software, which allows for intuitive and easy operation via a touch panel, making it accessible for operators of any skill level.
【nano Benchtop Compact Thin Film Experimental Equipment】
◉ nanoPVD-S10A: RF/DC Magnetron Sputtering Device
◉ nanoPVD-T15A: Organic Film and Metal Film Deposition Device
◉ nanoPVD-ST15A: Mixed Deposition and Sputtering Composite Thin Film Experimental Device
◉ ANNEAL: Wafer Annealing Device
◉ nanoCVD: Graphene/CNT Synthesis Device
◉ nanoEM: High Vacuum EM Coater
*For other detailed specifications, please contact us.

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