アークステーション List of Products and Services

"SAM-S" is an AMC monitoring device that integrates a cavity ring-down spectroscopy (CRDS) analysis system with a high-performance sampling system. It enables high gas flow rates, minimizes cross-port contamination, and quickly reports accurate AMC concentrations. Additionally, it can be configured to sample from up to 16 different locations and, when combined with Picarro's SI3401 gas analyzer, can measure ammonia (NH3), hydrogen fluoride (HF), and hydrogen chloride (HCl). 【Features】 ■ Inline AMC monitoring system ■ Measurement of NH3, HF, and HCl at ppt levels ■ Response time in seconds ■ Minimal setup time ■ Monitoring multiple locations within a cleanroom *For more details, please refer to the PDF document or feel free to contact us.

• Other measuring instruments

This document provides an explanation of the products handled by Ark Station Co., Ltd. It includes a portfolio of products related to sales and service agency operations, showcasing items for pre-processing, post-processing, and various processing treatments. Additionally, you can also view the main maintenance support devices used in maintenance and service contracting operations. [Contents] ■ Company Overview ■ Sustainability ■ Sales and Service Agency Operations ■ Maintenance and Service Contracting Operations *For more details, please refer to the PDF document or feel free to contact us.

• others

The "Model3100" is an optical interference film thickness measurement device that employs a linear array sensor for high-speed measurement. By standardly equipping spectral analysis software, it enables simultaneous measurement of multilayer films (typically up to three layers) and measurement of optical constants (n, k). It allows for fine-tuned parameter settings suitable for various film characteristics, enabling more diverse film thickness measurements for various film structures. 【Features】 ■ Capable of measuring up to 70μm in equivalent oxide film thickness with a high-sensitivity, high-resolution head (optional) ■ 100x lens (for a micro spot of φ0.75μm) is also available ■ Easy implementation of program settings for special film measurements suited to the process ■ Supports various applications (magnetic heads, FPD, materials research, etc.) and allows for the creation of sample stages tailored to specific uses (optional) *For more details, please refer to the PDF materials or feel free to contact us.

• others

This product is a particle-free, oil-free aluminum foil. It is suitable for packaging precision parts, semiconductor manufacturing equipment, protective coverings, as well as anti-adhesion plates, masking sheets, and thermal shields in vacuum equipment. It has a low particle generation rate and is easy to handle, available in rolls of 10 meters each. 【Specifications】 ■ Thickness: 0.0254mm ■ Width: 300mm ■ Vacuum packed, plastic core, with oxygen absorber included *For more details, please refer to the PDF document or feel free to contact us.

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