Tohoku Techno Arch Co., Ltd. List of Products and Services

　Pulmonary function imaging has been reported to provide valuable information for radiation therapy, and methods have been implemented to minimize dose deposition in high-functioning lung regions. Currently, most lung ventilation and perfusion imaging methods are based on the use of radioisotopes or contrast agents, such as single-photon emission computed tomography (SPECT) and positron-emission tomography (PET). Although these imaging techniques provide much useful information for local lung function, they have disadvantages such as radiation exposure, high cost, and requirement of special equipment. The inventors aimed to obtain lung function images from only 3DCT images taken at each treatment session. 　In recent years, it has become common to use deep learning (DL) for some tasks in radiotherapy, especially convolutional neural networks (CNN) for image processing. In the past, there have been attempts to convert 4DCT images into SPECT images, but they have not been sufficiently successful. In this study, the inventors developed a DL-based method to directly convert 3DCT images into krypton -81M gas (81mKr-gas) SPECT V images for the first time in the world. The present invention shows the possibility of predicting lung function from CT images alone with high accuracy and is expected to contribute to radiotherapy.

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To develop novel and effective diagnostic/therapeutic solutions against pathogenic viruses like SARS-Cov-2 in which the mutation frequencies are high, the technologies which enables to predict possible mutations before the spread of pathogenic variants with said mutations is required. In SARS-Cov-2, a trend in mutations was found by the analysis of various genomes from variants reported so far (reference 1), suggesting that this may be useful to identify possible mutation sites. 　This invention disclose the methods and programs to predict the site and the mutations therein in virus genome in the future by AI-based model developed by using above trend for leaning.

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Hemolysis is one of the major blood trauma in extracorporeal circulation. The occlusion is a parameter to eliminate deteriorative blood trauma as well as to improve assisted circulation efficacy during cardiopulmonary bypass (CPB). The strength of occlusion is adjusted manually in common method currently used, so the variation or deterioration of roller pumps or tubes causes hemolysis or multiple organ failure. The present invention relates to a new occlusion simulation model for evaluating the occlusion by the thickness of the flow in the tubing compressed with the CPB roller and raceway. The red-colored densitometry images were used to calculate the thickness of occluded flow channel.

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Cationic polymers are known to be used as nucleic drug delivery carrier because they are ease to be introduced into cells. However, it has been reported that the cationic polymers may inhibit cell proliferation by unspecific binding to intracellular proteins. This invention provides cationic polymer nanoparticles (nanogels) for intracellular delivery without inhibiting cell proliferation, by conducting radical polymerization reaction using a cationic polymerization initiator ADIP.　 Properties of NIPAM-based cationic nanogels synthesizing through ADIP: ・Can be delivered into many kinds of cells (e.g. HeLa) simply by mixing cells and the nanogels without special treatment ・In cells, nanogels do not effect the cell division or the differentiation of the brown adipocyte ・Intracellular temperature can be measured because of the heat-sensitive unit NIPAM

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Inflammatory bowel disease (IBD) is a general term for disease in which inflammation occurs in the colon, such as ulcerative colitis. The number of patients with ulcerative colitis is said to be 170,000 in Japan. Ulcerative colitis is an intestinal canal chronic inflammation that occurs in a relatively young aged people and it is an intractable disease with repeated recurrence and remission. 　The ulcerative colitis diagnosis is made through inflammatory findings and endoscopy. The presence of autoantibody such as anti-neutrophil cytoplasmic antibody and anti-smooth muscle cell antibody has been reported in ulcerative colitis, but the positivity rate is low with less than 50%. 　This invention is about a new marker with a positive rate of nearly 70% in patient with ulcerative colitis: anti-endothelial cell protein C receptor antibody (anti-EPCR antibody). This invention could be a new diagnostic marker for ulcerative colitis.

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The smart contract is one of applications of the blockchain technology which realizes transaction of confidential data. The smart contract enables a seller directly to make a contract with a buyer. And when a contract to provide some confidential data is established between them, the seller him/herself needs to send it to the buyer. So the buyer cannot receive the data while the seller is offline. One approach for solving the problem is as follows: The seller stores the data on some cloud storage in advance, and then permits the buyer to download it only after the completion of the contract. In this case, the seller needs to tell the buyer which storage the data is stored in. However, one cannot include any information about the storage in the contract document because it opens to the public via the blockchain. 　The information processing system we have invented enables buyer safely and automatically to receive confidential data even when seller is offline. Let us consider a situation that a seller has some confidential data and that a buyer makes a contract with the seller to get the data. In the situation, the system works as follows: First node (the seller) stores the data in Storage node. Then Second node (the buyer) write, in the contract document, an address to receive the data. The document including the address opens to the public, but no information about the storage where the data is stored does. When the contract is completed, the data is sent to the address by Storage node, and Second node can finally get it.

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When an organic electrochemical transistor (OECT) is modified with an enzyme such as glucose oxidase, it can be applied to a biosensor capable of detecting a sugar such as a blood sugar-level. The development of a non-enzymatic OECT biosensor has been promoted because of the instability and high price of enzymes. In the non-enzymatic OECT biosensor, phenylboronic acid (PBA), a glucose-sensing functional moiety, is generally used instead of enzymes. However, the electropolymerization reaction is essential for the application of PBA, and the complicated manufacturing process has been a problem.　 　The present invention relates to a glucose sensor that does not use an enzyme or PBA. The glucose sensor is driven by using a membrane containing a polysaccharide mixed with a conductive polymer as a glucose sensing site. The simplicity of the manufacturing process is also a major advantage because the entire process can be produced by printing if various metal inks are used as electrodes. The figure shows the result of measuring a glucose solution using the sensor. It can be seen that the low concentration of glucose can be detected without using enzyme or PBA.

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The number of dialysis patients continues to increase, and it is known that applox. 40% of the patients requiring dialysis in Japan were ordinally those with diabetic nephropathy (DN). The treatment for DN is often symptomatic by controling blood sugar and blood pressure, and to date, no effective therapeutic agent for curative treatment has been developed.　 　This invention discloses a 1, 3-dioxolane compounds D-532 and the derivertives thereof, which inhibits the function of the glucose-responsive transcription factor ChREBP (Carbohydrate responsive element binding protein), for DN treatment. 　D-532 was found by ordinally constructed high-throughput screening based on ChREBP reporter assay with applox. 7,000 of compound library in Tohoku University (Fig.1). Synthesized analogs and isomers thereof were also tested and showed inhibitory effect against ChREBP function, although D-532 showed the highest activity (Data not shown). 　The expression of ChREBP target genes were suppressed by D-532 administration for DN animal model (Fig.2). Urinary albumin excretion and blood creatinine were also improved in DN animals with D-532 (Fig.3). Further, the disappearance of foot process in glomerulus, which is often observed in DN kidney, was suppressed (Data not shown), suggesting that D-532 may act directly to renal tissue and show the effects above.

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Transition metal doping is one of the solution to colorize inorganic pigments. This method is adoptive to TiO2 pigments, however, transition metal-doped pigments are not sufficient for cosmetic products as transition metals have ecotoxicity. 　This invention realized wide variety of colored TiO2 pigments without transition metal doping, such as RGB as shown right half of this paper. 　This invention is expected to expand cosmetic product applications, or replace traditional organic and inorganic materials.

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Conventionally, diagnosis of Takayasu's arteritis has been made by angiography, etc., and a simple method for diagnosis by blood or other means has not been established. The inventors have identified two types of anti-vascular endothelial antibodies (AECA) that appear in patients with Takayasu's arteritis. These antibodies are considered useful as diagnostic markers for Takayasu's arteritis.

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Conventional growing device of seaweed is hung down from near the sea surface into the sea and light up the seaweed from the upper side. So that reason, they are often broken by driftage. Sunlight also come up them from the upper side, only one side of seaweeds is lighted and their growth efficiency is not good. This invention is about the light which has fixation property and able to illuminate from below the seaweed.

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Phenyl sulfate(PS) and indoxyl sulfuric(IS) are factor of Diabetic nephropathy(DN). Decreasing PS and IS in blood is important for DN treatment.　 　This is PS and IS reducing agent with L-metatyrosine and 2-azatyrosine as active ingredients.

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Ferroptosis is a form of regulated cell death associated with neurodegenerative diseases (e.g. Alzheimer's disease) and organ damage and is attracting attention as a therapeutic target. In this study, we found that vitamin K (especially the reduced form), a functional food ingredient, has a potent preventing effect on ferroptosis. Although a higher intake of vitamin K than those from the diet would be required to exert the anti-ferroptotic effect, vitamin K can be safely used even at high doses due to the no harmful effect reported. Thus, high-dose vitamin K supplementation is expected to be commercialized as a dietary supplement, functional food, and medicine.

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Causes of fatal diseases such as cerebral infarction and myocardial infarction include vessel diseases such as arteriosclerosis, vascular stenosis, or aneurysm. Early non-invasive detection of such vessel diseases can prevent the development of fatal diseases. Conventional PWV tests can only determine vascular stiffness. The present invention is a novel method that combines viscoelastic analysis of blood vessels and irregular vibration analysis of blood vessel walls. 　It is a noninvasive diagnostic method that can cope with various causes of arteriosclerosis. Aneurysms in the trunk, which are distant from the measurement site, can also be determined. ★The software patent was filed jointly with Rise Corporation, and the software will be manufactured by the company. ★A prototype of the equipment has been completed, and it is available for loan upon request.

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PI3K / AKT pathway is known as the major signaling pathway involved in survival and proliferation of cells. This is also known as the therapeutic target for cancer because this is aberrantly-activated for various cancer cells. 　Therefore, the inventors screened compounds with PI3K inhibitory activity from hundreds of compound. The results show that FK228 (a.k.a. Istodax（C）), HDAC inhibitor, and its analogs have PI3K inhibitory activity.

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　In conventional titanium nitride coating, sputtering method, a method in which titanium ions and nitrogen gas ions are irradiated on a substrate, and a plasma CVD method are known. 　Compared with these methods, the present invention uses nitrogen in air as a nitrogen source and does not require vacuum process. Therefore, the coating of titanium nitride can be performed at a low cost by a simple process, sliding property heat resistance and hardness can be easily added. The same effect can be obtained for ceramics as well as metals. In addition to titanium, nitrides such as chromium and manganese can be produced as coating materials.

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This invention is for a permanent magnet reluctance generator(PMRG) employing the ferrite magnet instead of the rare-earth magnet, which has almost the same output power and efficiency in comparison with the one employed rare-earth magnet in spite of lower cost. 　The optimum shape for the rotor pole-tip was designed to reduce torque ripple, which enables noiseless running.

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Understanding gene functions in marine invertebrates has been limited, largely due to the lack of suitable assay systems.　 　The inventors discovered a strong viral promoter derived from a bivalve-infectious virus, ostreid herpesvirus-1 (OsHV-1). 　This promoter showed 24.7-fold and 16.1-fold higher activity than the cytomegalovirus immediate early (CMV IE) promoter and the endogenous EF1α promoter, the two most commonly used promoters in bivalves so far (Fig.1). 　GFP assays showed that the OsHV-1 promoter is active not only in scallop cells (Fig.2) but also in HEK293 cells (Fig.3) and zebrafish embryos.

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Alcohol oxidation is one of fundamental reactions in organic chemistry. This reaction is especially useful for synthesizing high-valueadded compounds such as medicine, pesticide, perfume and so on. Although, TEMPO and the related compounds featuring AZADO skeleton (e.g. AZADO, 1-Me-AZADO, and ABNO) are often used as alcohol oxidation catalyst , there are some problems concerning catalytic activity and reaction efficiency. This invention provides novel alcohol oxidation catalyst “Nor-AZADO” which can effectively oxidize sec-alcohol as well as n-alcohol using air as the terminal oxidant.

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Blue light irradiation has been shown to be effective in killing more than 10 species of pests. Previous studies have used light-emitting diodes, but large facilities have had problems with their light intensity.　 　Therefore, the inventors have developed a device that effectively emits blue laser light as a device that exerts insecticidal effects over a wide area. (Usefulness) ・Safe compared to methods using ultraviolet light to kill insects. ・Suitably designed to kill multiple species and objects at different stages of development. ・At the same time as killing, growth can be promoted by shining a favorable light on plant growth.

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Injection device of liquid with active species have been developed in order to disinfect and extermine pathogens and pests using plasma. This device is configured to create plasma to generate the active species, and to inject the liquid containing the active species through a jet. However, the heat of plasma raises temperature of the liquid in the reaction vessel, and the short-lived active species may be deactivated if the plasma discharge time is too long so the sterilization effect may be reduced. 　This invention can provide an injection device of liquid containing active species and sterilization & extermination method that can maintain a high disinfection effect even when the plasma discharge time is long. This invention has a dissolution injection means containing active species which is obtained by dissolving plasma-active gas into liquid and a cooling means to prevent the temperature rise in order to maintain a high sterilization effect.

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　Previously, Ppc1, a small molecule compound derived from a cellular slime mold, was only known to inhibit the growth of cultured cells.　 　We have demonstrated that Ppc1 and its derivatives have inhibitory and uncoupling effects on IL-2 production.

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In comprehensive gene expression analysis such as T cell receptor (TCR) repertoire analysis, it is important that target specific and non-biased gene amplification products are obtained. Conventional methods often ligate adapters with restriction enzyme site to synthesized cDNA ends and treat adapter-ligated cDNAs with said restriction enzyme before specific amplification. In such methods, however, unused and untreated adapters often inhibit target specific and non-biased amplification.　 　This invention performs target specific, non-biased gene amplification by combination of uracil-containing adapter and uracil DNA glycosylase (UNG) treatment (Fig 1).

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Laser scanning microscopy, used for observing a sample by scanning a laser focal spot and detecting reflecting, scattering, or fluorescence signals from a target can be increased acquisition speed of 2D images by high-speed raster scanning of a laser beam. But the rapid acquisition of 3D images is substantially restricted due to the need of changing the moving observation plane. 　Using the present invention can be possible the optical 3D imaging acquired at once without moving the optical system or target, because optical information along the optical axis obtained in different lateral position on the detector by separately concentrating the lights.

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Aluminum nitride (AlN) is known to be used as a filler in the sealing resin of electronic components and semiconductors to efficiently dissipate the heat due to its high insulation and thermal conductivity. AlN particles are manufactured at high temperatures, but the conventional method can not include a large amount of AlN particles in the resin. In recent years, the improvement of sealing resin strength is required since the demands for miniaturization of electronic components and semiconductors are increasing. 　This invention can simply provide a new form of AlN that can be suitably used as a thermally conductive filler and a high strength filler. This invention is characterized by the process of mixing the carbon and alumina particles in a crucible then to achieve a mixture ratio more important than the stoichiometric mixture ratio required to produce AlN, and irradiating the alumina particles with microwaves under a nitrogen atmosphere to reduce and nitride the alumina particles with carbon particles. This invention describes also the process of sublimating the AlN and attaching it to a sample in a non-heated state to produce an AlN wire.

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In X-ray and neutron interferometry, the wavefront control elements must be precisely shaped. Grating with high-precision shape is required especially for interferometer where metallic glass grating is used as wavefront control elements. To obtain a metallic glass grating, it is preferable to bring the grating as close as possible to the crystallization initiation temperature with fast heat-up. However, more the temperature is high, more the lifetime time for the supercooled liquid is short. Therefore, the metallic glass material has to be molded while the viscosity is still high. In addition, the conventional grating manufacturing has difficulty to obtain small structures and the process needs long time. 　This invention is able to form a metallic glass material with low viscosity, and to provide a manufacturing method, wavefront-controlled elements and diffraction grating with structure smaller than few 10μm having precise shape control in a short time. This invention has a process of heating a metallic glass material in a supercooled state to a temperature above the crystallization begins, and mixing until the crystallization is completed.

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The conventional chemical for sterilization and pest extermination destroys the environment due to its residue. In order to solve this problem, the following technical issues needed to be accomplished. Apply highly bactericidal and environmentally friendly hydroxyl radical (OH radical) for sterilization, disinfection and pest extermination １，Establish an efficient method for producing a large quantity of hydroxyl radical ２， Substitute air for helium and argon expensive gases to reduce cost and weight (ease of transport). The most important characteristic of this invention is the creation of a plasma jet device where the air is used instead of expensive gases such as helium and argon, and introduces a water mist that can produce a large quantity of hydroxyl radicals, which are the most effective for sterilization.

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The micro-scanner which is being developed to reduce the LiDAR (Light Detection and Ranging) size is a MEMS device that has a mirror and a torsion bar to support it, and scans with the laser beam in 2D. So far, the torsion bar could break in a short time due to hydroxylation/oxidation caused by moisture/oxygen adhesion to its surface. In addition, even a standard protective film is formed on the torsion bar surface, it cannot completely prevent moisture and oxygen adhesion, so the degradation of the torsion bar cannot be avoided. As consequence, vacuum sealing of the mirror device was required to obtain a practical life of the torsion bar. 　This invention is able to provide a scanning mirror and its manufacturing method that can prevent deterioration from oxidation and hydroxylation of the torsion bar in the atmosphere. This invention is composed of a mirror section and a torsion bar in which the surface is covered with an ALD (Atomic Layer Deposition) layer.

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Aluminum nitride (AlN) is known to be used as a filler in the sealing resin of electronic components and semiconductors to efficiently dissipate the heat due to its high insulation and thermal conductivity, and can significantly improve their life. However, the shape of the AlN particles produced by sintering at high temperature for a long time is extremely irregular, and it is not possible to include a large amount of AlN particles uniformly in the sealing resin. 　This invention is able to simply provide AlN particles with a new configuration that can be suitably used as a thermally conductive filler. In this invention, carbon & alumina particles are mixed and placed in a crucible, then irradiated by microwaves, contrary to conventional method where alumina particles are completely reduced by carbon particles.

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In order to realize pesticide-free agriculture that is safe for human body, research on pathogen and pest control using plasma effluent gases are actively conducted. The use of plasma can sterilize vegetables without leaving any harmful residue, which makes it possible to provide pesticide-free vegetables that are safe for human health. Conventional pathogen and pest control devices are designed to generate OH radicals in the reaction vessel. In order to use this pathogen and pest control device for agriculture, it is preferable to generate as many OH radicals as possible to exterminate pathogens and pests quickly and efficiently. 　This invention is able to provide a pathogen and pest control device and a reaction vessel that can efficiently exterminate pathogens and pests in a short time. Since this invention has a shape that reduces the water flow velocity, the water evaporation rate can be increased and the OH radicals can be generated efficiently. Pathogens and pests can be exterminated by irradiating the OH radicals and short-lived reactive species derived from the OH radicals.

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In recent years, the development of micro-scanner using MEMS scanning mirror has intensified in order to reduce the optical sensor system size such as LiDAR (Light Detection and Ranging). The omnidirectional scanning mirror which is a type of MEMS mirror device, is being researched for its potential application for LiDAR equipped on automated vehicle. One possibility to realize this is to rotate the mirror section by using "gimbal" technology, which has 2 mutually orthogonal axes. However, the rotation around the 2 orthogonal axes interferes with each other, resulting in nonlinear motion, making it impossible to control the mirror movement in a stable manner. 　This invention can provide an omnidirectional scanning mirror that can stably control the mirror movement. This omnidirectional scanning mirror is composed of a mirror, a rotation axis and a support section. The vertical component of the moment of inertia tensor of this mirror is located within a certain range in order to control mirror stability.

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Conventional technologies for joining metal and resin include mechanical fastening with rivets, bolts, nuts, etc. and adhesive bonding, but the former has problems such as poor airtightness and increased number and weight of parts in the bonding area, while the latter has low adhesive strength due to the lack of adhesives for thermoplastic resins and low reliability in long-term use. 　The present invention relates to a technology for joining resin and metal simply, firmly, quickly, and at low cost, which differs from the above methods in that it is a dry process, does not require expensive equipment, and is not a wet process, thus eliminating the need for waste liquid treatment.

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As an environmentally friendly solar cell, light, transparent, and flexible solar cells are required. However, a technique that satisfies these three points has not yet been reported. On the other hand, a transparent solar cell using a semiconductor material such as transition metal dichalcogenide (TMD) has been proposed as a candidate that satisfies the above requirements. The present invention relates to a light, transparent, and flexible photoelectric conversion device using a TMD, and further to a technology that enables provision of a transparent solar cell capable of enlarging an area by an inventor's ingenuity.

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Rectenna composed of an antenna and a diode is known as a device for converting electromagnetic waves into electric power. The rectenna absorbs electromagnetic waves with an antenna and performs photoelectric conversion. In recent years, research on optical rectennas, in which rectenna technology is applied to the optical frequency domain, has been advanced, and results of photovoltaic power generation have been reported. However, the optical rectennas reported at present are difficult to manufacture or have low efficiency.　 　The present invention has succeeded in significantly increasing the photoelectric conversion efficiency by introducing a special structure and material into the metal-dielectric-metal (MIM) tunnel diode and established an device based on hollow resonators.

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The Fan-out Wafer Level Package (FOWLP) method, which is the mainstream method for semiconductor packages, especially for mobile applications, has a problem of "die shift" in which mounted components shift by flow of sealing resin and wiring defects occurred. Further, even in a device such as a flexible display, there is a problem that a mounted component on the device is shifted when the device is bent.　 　In order to solve the above problems, the invention is a method of manufacturing a semiconductor package without die shift by incorporating a special anchor layer under a mounting component and adopting a special manufacturing process, and the semiconductor package. 　The invention is expected to produce a highly integrated semiconductor package without a die shift, and to be applied to a flexible display and a wearable device.

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To realize a low-carbon society, alkaline water electrolysis equipment, which uses renewable energy to electrolyze water and produce hydrogen, is attracting attention. However, the nickel (Ni) electrode used for the anode of conventional alkaline water electrolysis equipment degrade under fluctuating electric power derived from renewable energy. In addition, stainless steel which is one of the alternative anode material for Ni have the problem that chromium elute into the alkaline electrolyte and generate toxic hexavalent Cr during the electrolysis.　 　In the invention, in order to solve the above problems, a certain ingenuity has been applied to solve the conventional problem of electrode performance degradation, and the dissolution amount of Cr has been successfully suppressed.

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In recent years, spintronics, which make active use of the small magnetic property (spin) of electrons, has attracted attention from the viewpoint of realizing devices with low power consumption and high density. Many of the spintronics functions are driven by a spin flow. So the pioneering of innovative generation and control methods of spin flow has been required.　 　The present invention is a new development of magnetic metamaterials with artificially manipulated symmetry in nano space, and pioneered a new principle that completely controls the propagation direction and magnitude of spin flow at room temperature and at ultra-high speed by the polarization state of light pulses. 　The present invention is expected not only to dramatically improve the degree of freedom in designing next-generation spintronics devices, but also to be applied to ultrafast optical spintronics, in which conventional optical science and spintronics technologies are developed through nanotechnology.

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Current platinum (Pt) materials and alloys of Pt and other precious metals (Ni, Co, Pd, etc.) are used as fuel cell electrocatalysts. However, current materials are expensive. On the other hand, the activity efficiency of alloy made of Pt and inexpensive materials (such as carbon) was not enough for electrocatalysis.　 The present invention focuses on alloy made of silicon (Si) and Pt by dry process. It can be solved above problems because Si　has abundant reserves. Furthermore, the developed alloy nanoparticles of Pt and Si shows 2.5 times more catalytic activity than commercially available Pt/C catalysts, and therefore it is expected to be alternative materials for fuel cell electrocatalysts.

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Ceramics – carbon composite having multi-function is developed in the recent years. However, the composite is heated at high temperature for a long time during the manufacturing process so the particles are sintering between them and the Li4Ti5O12 nano particles able to generate high power cannot be obtained. Moreover, the synthesis method is complex and uses expensive raw materials so the manufacturing cost is high. 　This invention can provide oxide ceramics – carbon composite and its manufacturing process with reduced cost. This invention manufacturing process is to mix raw material of oxide ceramics made by LiO2 and TiO2 with carbon and fire with microwave in order to create Li4Ti5O12 carbon composite. As result, Li4Ti5O12 crystalline particle which is an oxide ceramics having particle diameter lower than 250nm; and oxide ceramics – carbon composite having above mentionned carbon bond on the crystal plane (111) and (200) of the oxide ceramics – carbon composite were obtained.

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As an alternative to ITO widely used as a transparent conductive material, Ag nanowires have attracted attention because of their high flexibility, optical transparency, conductivity, and durability.　 　As a conventional manufacturing method of Ag nanowires, a method using a protective agent such as a polyol method is typical. 　However, in order to remove the protective agent which is an additive, there are problems such as manufacturing process, increase in manufacturing cost, and waste treatment. On the other hand, the present invention can suppress the extra manufacturing cost because no additive is used, and it is possible to fabricate Ag nanowires with large aspect ratio with good yield and low cost.

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Conventional nitride coating methods include CVD (chemical vapor deposition) and PVD (physical vapor deposition). However, there is a problem that the manufacturing process is complicated and the work is not efficient because pressure adjustment and atmosphere replacement by vacuum equipment are required. Therefore, the nitride coating in the atmospheric pressure has been developed, but there is a problem that the surface is uneven. The present invention shows follow features, and it can solve above problems. ・ TiN(Nitride coating) is formed by microwave process. ・ Vacuum process is not needed. ・ Nitride coating is formed more uniformly.

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　γ-Gallium oxide (γ-Ga2O3) is one of the metastable structures of gallium oxide and has excellent catalytic properties. However, it was difficult to be synthesized. In the conventional method for producing γ-Ga2O3, gallium nitrate hydrate was dissolved in distilled water with urea and baked at 500ºC. However, this method required a facility for high-temperature treatment and had a problem of increasing production costs such as equipment costs.　 　The present invention makes it possible to provide a method for producing gallium oxide at a low temperature and a simple process, thereby reducing production costs. 　It is characterized in that a raw material solution containing liquid gallium and a reducing agent is irradiated with ultrasonic waves. Thus, particles of gallium can be refined, and particles having crystals of γ-Ga2O3 can be formed on the surface thereof. As a result, the baking process and the complicated separation and cleaning process are not required, the manufacturing cost is reduced, and γ-Ga2O3 can be produced by a simple process at a low temperature.

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In recent years, interest in preventing sunburn and stain has been growing in the health care field. If ultraviolet ray can be easily measured using smartphone, etc., it is expected to contribute to health management and cosmetic medicine. In addition, the number of device that handle ultraviolet ray is increasing in the industrial field, so the need for measuring and sensing ultraviolet ray is growing.　 　This invention is able to measure from UV-A, which causes stain and wrinkles, to UV-B, which causes sunburn, by using silicon semiconductor. So far, silicon photodiode (PD) technology with high sensitivity in wide optical wavelength range of 190-1100 nm and high light resistance that does not deteriorate even after long term exposure to intense ultraviolet light has been developed. Moreover, a technology that selectively and efficiently detects optical signal in the UV region even in environment with background light including visible light and near-infrared light, has been achieved by applying this silicon PD technology to a new differential type detection method. *Theoretically feasible for also UV-C (consultation required)

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MoS2 is attracting attention as the material for next-generation nanodevices with low power consumption and new functionality. Current fabrication methods include intercalation, which is a method of inserting ions to widen the interlayer distance and exfoliate, and chemical vapor deposition (CVD), which is a method of depositing a film on the surface of a substrate by supplying a source gas containing thin film components, but the former is of low quality and the latter is expensive and less productive.　 　This invention relates to a method for producing novel layered nanosheets of high quality, such as low cost, low interlayer residue and high orientation, which solve the above problems. Examples of producing layered nanosheets are MoS2 and graphite, but other layered nanosheets can also be produced.

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・ Recently, ToF sensors that can measure the distance from an object are attracting attention in various fields such as automobiles, robots, and sensor. ・ However, conventional ToF sensors have a issue that it is difficult to improve both characteristics because there is a trade-off between frame rate and depth noise. ・ Therefore, this work has successfully solved the above issue by with in-pixel analog memory array for each image sensor and sub-frame integration. ・ This work achieved up to 10kfps at HS mode and depth noise is less than 1.3% at HP mode(0.4-4.2 m). ・ This work shows higher characteristics than conventional ToF sensors, and therefore, it is expected to be applied to autonomous driving sensors, autonomous running robots, factory automation (FA), drones, VR/AR, etc.

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