Plasma-resistant O-ring Fluoro Power DPR (special fluorine rubber)
Special material (fluororubber + fluororesin) without the use of a compound material, using O-ring cherry seals.
This is a special material that has excellent plasma resistance while maintaining a high cost advantage. Because it does not use any blending agents, it excels in low particle generation and demonstrates excellent plasma resistance in dry processes for semiconductors and liquid crystal-related equipment. It is effective as a lower-tier alternative to the non-filler type heat-resistant perfluoro material "FluoroPower FFN (FFKM-Plasma Resistant)." Sakura Seal Co., Ltd. offers a wide variety of O-rings, ranging from extremely small O-rings to large diameter rings, in both general standard sizes according to JIS standards and various other sizes, supporting appropriate O-ring selection in terms of both material and size. * Various types of fluororubber, including perfluoro, are the materials that Sakura Seal Co., Ltd. specializes in the most. * We also accommodate shapes other than O-rings.
- Company:桜シール 日本本社
- Price:Other