There are three types of airflow: 10, 20, and 30 m³/min, which are suitable for localized (spot) applications in semiconductor, precision, LCD, and other industrial manufacturing equipment.
As an option ◆ Additional exhaust outlet installation (up to 4 single pipes for duct connection, with damper) ◆ Additional single pipe installation for return duct connection ◆ Air-cooled refrigeration unit (outdoor installation type)… refrigerant piping work and electrical work required (estimate based on installation location)
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basic information
●The era is now significantly moving towards the cleaning of specific parts. ●We supply precision temperature clean air to localized (spot) areas of semiconductor, precision, LCD, and other industrial manufacturing equipment. ●Airflow options of 10/20/30 m³/min are available. ●A high-precision humidity control dry air type is also available as a sibling model.
Price information
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Delivery Time
P4
Applications/Examples of results
Spatter devices, three-dimensional measuring instruments, coating and laminating devices for various discs (CD-R, DVD-R, DVD-RW, DVD-RAM), research and development equipment for bio/pharmaceuticals, low-humidity printing processes.
Company information
We manufacture equipment that creates clean air spaces featuring precise temperature and humidity control, characterized by our registered trademark technology "Thermal Clean." We are one of the pioneers in cleanroom construction in Japan. We provide a consistent service from the manufacturing of heating and cooling equipment to construction. We are a 100% subsidiary of Chino Corporation, which is listed on the Tokyo Stock Exchange's First Section.
