The model 106F is a sensor that can measure low viscosity liquids from a low flow rate of 15 mL/min to a large flow rate of up to 50 L/min.
Model 106F is a sensor that can measure low viscosity liquids from a low flow rate of 15 mL/min to a large flow rate of up to 50 L/min. It employs a Belton-type micro turbine wheel (patented), allowing for long-term accurate measurements with excellent reproducibility. The design is adapted for ultra-clean applications, ensuring no particle generation. The connection uses flare fittings to prevent fluid from entering the threaded parts. An electrical connection is provided with a 1.8 m cable, and the power supply and output can be selected based on the application.
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basic information
Model 106F is a sensor capable of measuring low-viscosity liquids at flow rates ranging from 15 mL/min to approximately 50 L/min. It employs a Belton-type microturbine wheel (patented) that allows for long-term accurate measurements with excellent reproducibility. The design is adapted for ultra-clean applications, ensuring no particle generation. The connection uses flare fittings to prevent fluid from entering the threaded parts. An 1.8 m cable is included for electrical connections, and power supply and output can be selected according to the application.
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Applications/Examples of results
Material for liquid contact parts: Teflon, suitable for liquids such as Calrets and Sapphire. ○ Measurement of hydrofluoric acid and other acid lines ○ Measurement of CMP slurry lines ○ Measurement of pure water ○ Measurement of developer solutions ○ Measurement of almost all low-viscosity liquids, etc.
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Company information
Air Water Mechatronics Co., Ltd. ST Division handles excellent measurement/control equipment focused on the most important themes of pressure and flow in the field of measurement and control in the industrial sector. In pressure measurement, as the Japanese distributor for Setra Systems, we have supplied numerous pressure sensors domestically for many years. Setra's pressure sensors are characterized by high precision and sensitivity, and are used in many advanced technologies, including semiconductor manufacturing equipment. Additionally, to accommodate various industrial pressure measurement scenarios, we also handle products from companies such as BD and Honeywell. We manufacture digital pressure gauges that incorporate or externally attach these pressure sensors. Within our company, various pressure standards with traceability to national standards are installed in a strictly air-conditioned calibration inspection room, allowing us to conduct inspections and recalibrations in-house. Regarding flow measurement, we offer unique and high-value-added products for both liquid and gas (mass flow). For liquids, we primarily provide small, cost-effective, and highly accurate turbine flow meters, as well as Coriolis flow meters. We respond to diverse needs with disposable sensors for pharmaceutical and medical manufacturing, as well as certified sensors for food and beverage applications.