Compact size and low cost. Active in semiconductor manufacturing lines, etc. Capacitive type.
The "730 Series" is a capacitance vacuum sensor from Setra Systems that achieves compact size, low cost, and high precision. It detects changes in capacitance and converts them into a linear DC voltage signal for output. With a wide temperature compensation range and excellent pressure resistance, it can be used in various applications, playing a crucial role in measuring vacuum pressure ranges in a wide range of fields such as solar panels, semiconductors, and petrochemicals. 【Features】 ■ Extremely low noise influence ■ Inconel used in gas contact parts ■ CE mark compliant / RoHS compliant ■ Option to select connection fittings *The catalog for the "730 Series" can be immediately accessed via PDF download. If you have any other questions, please feel free to contact us.
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basic information
【Specifications】 ◎ Pressure Range: 0 to 1 kPa to 0 to 100 kPa ◎ Accuracy: ±0.5% of reading (±0.25% option) ◎ Compensation Temperature: 0 to 50℃ ◎ Power Supply: DC 12 to 30V ◎ Long-term Stability: ±0.5% FS/year ◎ Response Time: 20 msec ◎ Overload Pressure Resistance: 300 kPa *For more details, please refer to the documentation. Feel free to contact us with any inquiries.
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Applications/Examples of results
【Target Industries and Applications】 ● Various semiconductor industries ● Etching equipment ● Chillers ● Laser equipment ● Autoclaves ● Freeze dryers
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Company information
Air Water Mechatronics Co., Ltd. ST Division handles excellent measurement/control equipment focused on the most important themes of pressure and flow in the field of measurement and control in the industrial sector. In pressure measurement, as the Japanese distributor for Setra Systems, we have supplied numerous pressure sensors domestically for many years. Setra's pressure sensors are characterized by high precision and sensitivity, and are used in many advanced technologies, including semiconductor manufacturing equipment. Additionally, to accommodate various industrial pressure measurement scenarios, we also handle products from companies such as BD and Honeywell. We manufacture digital pressure gauges that incorporate or externally attach these pressure sensors. Within our company, various pressure standards with traceability to national standards are installed in a strictly air-conditioned calibration inspection room, allowing us to conduct inspections and recalibrations in-house. Regarding flow measurement, we offer unique and high-value-added products for both liquid and gas (mass flow). For liquids, we primarily provide small, cost-effective, and highly accurate turbine flow meters, as well as Coriolis flow meters. We respond to diverse needs with disposable sensors for pharmaceutical and medical manufacturing, as well as certified sensors for food and beverage applications.
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