Hitachi Industrial Equipment Systems Filter Unit for Manufacturing Equipment
Hitachi Industrial Equipment Systems
A slim and energy-efficient filter unit that is easy to integrate into semiconductor manufacturing equipment.
Hitachi's fan filter unit has achieved a slim, energy-efficient, and lightweight design by using high-efficiency fans. Even with an increase in electrical components installed on top of the FFU in semiconductor manufacturing equipment, it can be made slimmer without changing specifications such as airflow velocity. Features of the FFU for equipment: - Achieves a lightweight and slim design for easy integration into semiconductor manufacturing equipment. - Realizes high efficiency of motors and fans with minimal heat generation and reduced impact from temperature rise due to high overall fan efficiency. - Capable of accommodating external static pressure of 98Pa, considering pressure loss from chemical filters and other components. - Designed to achieve low power consumption, contributing to energy savings. - Capable of delivering a large airflow with a single fan, providing excellent operability and flexibility for customized solutions. - Can flexibly respond to external airflow control. - All units undergo thorough inspection, ensuring a reliable and safe service system. For further details, please contact us.
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basic information
- Considers pressure loss of chemical filters, compatible with external static pressure of 98Pa. - Power supply can be selected from four types (1φAC100V/1φAC200V/DC48V/3φAC200V). - Full inspection is conducted.
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Applications/Examples of results
It is used as an FFU incorporated into semiconductor manufacturing equipment. It is thin, lightweight, and energy-efficient, making it suitable for environments where maintaining a clean environment and energy conservation are required.
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| Model number | overview |
|---|---|
| PCU-0606DB-E |
Company information
Kyushu Kiden Co., Ltd. not only sells electrical and mechanical products such as air conditioning equipment, industrial machinery, air compressors, elevators, escalators, and lighting fixtures as a Hitachi sales agent, but also provides solutions that contribute to energy conservation and decarbonization (SDGs), including the currently popular solar power generation (PPA), biomass power generation, and waste heat recovery units. The company is also certified as a planner for ZEB (Net Zero Energy Building), which has recently gained attention in corporate energy-saving measures, and has received great acclaim for its comprehensive energy-saving proposals for entire buildings. 【Service Areas】 - Fukuoka, Saga, Kumamoto, Oita, Yamaguchi, Hiroshima, Osaka 【Major Qualifications】 - First-Class Plumbing Construction Management Engineer - First-Class Electrical Work Construction Management Engineer - Designated Construction Industry Supervisory Engineer (Plumbing) - Designated Construction Industry Supervisory Engineer (Electrical Work) - First-Class Electrician - Chief Technician for Water Supply Equipment Construction - First-Class Refrigeration and Air Conditioning Equipment Construction Skill Technician - Building Equipment Engineer - First-Class Civil Engineering Construction Management Engineer - Third-Class Refrigeration Machinery Manufacturing Safety Manager - Refrigeration and Air Conditioning Construction Safety Management Certificate - Refrigerant Handling Technician Certificate - First-Class Hitachi Refrigeration and Air Conditioning Technician (Air Conditioning and Low Temperature) - And many others.
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