TOC monitoring for ultrapure water production equipment for semiconductors
Sievers TOC Analyzer
To measure the TOC of ultrapure water, it is necessary to choose the optimal measurement technique.
Measurement Techniques for Low Concentration Monitoring There are two measurement techniques for monitoring low concentrations of TOC: gas permeable membrane conductivity measurement and direct conductivity measurement. Sievers provides optimal measurement techniques tailored to monitoring points. - TOC Analyzer Sievers M9e / M500e (Gas Permeable Membrane Conductivity Measurement) Prevents false detection and detection misses caused by organic halogen compounds and amines present in ultrapure water production systems. - TOC Analyzer Sievers CheckPoint e (Direct Conductivity Measurement) Suitable for general monitoring points. Enables rapid diagnosis/troubleshooting.
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basic information
【Gas Permeable Membrane Conductivity Measurement Method】 ・Sievers M9e Measurement Range: 0.03 ppb to 50 ppm Measurement Time: 2 minutes ・Sievers M9e Turbo Mode Measurement Range: 0.20 ppb to 10 ppm Measurement Time: 4 seconds ・Sievers M9e Measurement Range: 0.03 ppb to 2.5 ppm Measurement Time: 3 minutes 【Direct Conductivity Measurement Method】 ・CheckPoint e Measurement Range: 0.05 ppb to 5 ppm Measurement Time: 15 seconds
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Applications/Examples of results
Monitoring of ultrapure water production equipment in the semiconductor industry The appropriate model varies by sampling point M9e: Feed water/RO water/Recovery water M500e: UPW/Subsystem CheckPointe: Diagnostics/Troubleshooting
Detailed information
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**Sievers' Unique Gas Permeable Membrane Conductivity Measurement Method** In the TOC measurement method for conductivity, the conductivity indicated by the carbon dioxide (carbonate ions) produced after the oxidation and decomposition of organic matter is measured to calculate the carbon concentration. The Sievers M500e employs a carbon dioxide separation measurement mechanism called the "gas permeable membrane module," which uses a thin Teflon film to separate carbon dioxide from the sample water to the pure water line within the analyzer, enabling accurate TOC measurement by eliminating the influence of other ions.
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The Sievers M9e online/portable model can accommodate various applications with its unique gas-permeable membrane conductivity measurement method and wide measurement range (0.03 ppb to 50 ppm). The optional turbo mode (analysis time of 4 seconds) is useful for monitoring recovered water. Features of the Sievers M9e: - Three models: lab type/portable type/online type - Matching of measurement deviations - Stability in ultra-low concentration ranges - Automatic operation (calibration/verification/data analysis, etc.) - 12 months of calibration stability
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The Sievers M500e is a reagent-free online TOC analyzer for UPW targeting low concentration ranges (0.03 ppb to 2.5 ppm). Features of the Sievers M500e: - Detection of organic acids and organic nitrogen compounds that pose significant risks to water quality using gas-permeable membrane conductivity measurement technology - Capable of measuring low DO water and hydrogen water - Intuitive operation via a 10-inch touchscreen - Isopropanol 100 ppb verification protocol - Adaptive auto-zero function that automatically adjusts to changes in water quality.
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Sievers CheckPoint e is a TOC sensor using DC technology that is useful for diagnosing and troubleshooting UPW systems. Features of Sievers CheckPoint e: - Direct conductivity measurement method - Lightweight (3.6 kg) and easy to carry - Compatible with both pressurized and non-pressurized samples
Line up（3）
| Model number | overview |
|---|---|
| TOC Analyzer Sievers M9e | Application: Raw Water/RO Water/Recovery Water |
| Online TOC Analyzer Sievers M500e | Application: UPW/Subsystem |
| TOC Sensor Sievers CheckPointe | Application: Diagnostics/Troubleshooting |
Company information
Since our establishment in 1967, we have been committed to the development and dissemination of water quality measuring instruments that anyone can use quickly, easily, and with high precision. In today's world, where effective utilization of the limited resource of water is required alongside environmental conservation, we aim to be a total solution provider that responds to all water environments by leveraging our water quality measuring instruments, technology, and services. Additionally, we are dedicated to utilizing the latest technology and our years of expertise to deliver user-friendly and reliable water quality measuring instruments more affordably, quickly, and widely.
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