TOC monitoring for ultrapure water production equipment for semiconductors

basic information

【Gas Permeable Membrane Conductivity Measurement Method】 ・Sievers M9e Measurement Range: 0.03 ppb to 50 ppm Measurement Time: 2 minutes ・Sievers M9e Turbo Mode Measurement Range: 0.20 ppb to 10 ppm Measurement Time: 4 seconds ・Sievers M9e Measurement Range: 0.03 ppb to 2.5 ppm Measurement Time: 3 minutes 【Direct Conductivity Measurement Method】 ・CheckPoint e Measurement Range: 0.05 ppb to 5 ppm Measurement Time: 15 seconds

Price range

Delivery Time

Applications/Examples of results

Monitoring of ultrapure water production equipment in the semiconductor industry The appropriate model varies by sampling point M9e: Feed water/RO water/Recovery water M500e: UPW/Subsystem CheckPointe: Diagnostics/Troubleshooting

Detailed information

• 

  **Sievers' Unique Gas Permeable Membrane Conductivity Measurement Method** In the TOC measurement method for conductivity, the conductivity indicated by the carbon dioxide (carbonate ions) produced after the oxidation and decomposition of organic matter is measured to calculate the carbon concentration. The Sievers M500e employs a carbon dioxide separation measurement mechanism called the "gas permeable membrane module," which uses a thin Teflon film to separate carbon dioxide from the sample water to the pure water line within the analyzer, enabling accurate TOC measurement by eliminating the influence of other ions.

• 

  The Sievers M9e online/portable model can accommodate various applications with its unique gas-permeable membrane conductivity measurement method and wide measurement range (0.03 ppb to 50 ppm). The optional turbo mode (analysis time of 4 seconds) is useful for monitoring recovered water. Features of the Sievers M9e: - Three models: lab type/portable type/online type - Matching of measurement deviations - Stability in ultra-low concentration ranges - Automatic operation (calibration/verification/data analysis, etc.) - 12 months of calibration stability

• 

  The Sievers M500e is a reagent-free online TOC analyzer for UPW targeting low concentration ranges (0.03 ppb to 2.5 ppm). Features of the Sievers M500e: - Detection of organic acids and organic nitrogen compounds that pose significant risks to water quality using gas-permeable membrane conductivity measurement technology - Capable of measuring low DO water and hydrogen water - Intuitive operation via a 10-inch touchscreen - Isopropanol 100 ppb verification protocol - Adaptive auto-zero function that automatically adjusts to changes in water quality.

• 

  Sievers CheckPoint e is a TOC sensor using DC technology that is useful for diagnosing and troubleshooting UPW systems. Features of Sievers CheckPoint e: - Direct conductivity measurement method - Lightweight (3.6 kg) and easy to carry - Compatible with both pressurized and non-pressurized samples

Line up（3）