The substrate is set on a porous PE plate! No need to flip the substrate even for inspection on both sides.
We would like to introduce our "Floating Substrate Transport Device." The material used is ultra-high molecular weight polyethylene (UHMW-PE), with an average pore diameter ranging from Min 2μm to Max 80μm, and a porosity of 35% to 40%. Additionally, it employs a static electricity prevention method that leaks static electricity to the outside through conductive pathways formed in the air holes, with a heat resistance temperature of up to 90°C for continuous use. 【Specifications (partial)】 ■ Material: Ultra-high molecular weight polyethylene (UHMW-PE) ■ Average pore diameter: Min 2μm to Max 80μm ■ Porosity: 35% to 40% ■ Flatness: 10μm ■ Static electricity prevention method: Leaks static electricity to the outside through conductive pathways formed in the air holes *For more details, please refer to the PDF document or feel free to contact us.
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【Other Specifications】 ■Heat resistance temperature: Continuous 90℃ ■Density: 0.94g/cm3 ■Maximum dimensions: 1,000mm×1,000mm×8t～ ■Case material: SUS Al *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company develops, manufactures, and sells a suction levitation transport system for micro parts using ultra-high molecular weight polyethylene porous materials. We create air transport systems that take micro parts into consideration. Additionally, you can check the fluidity of the target workpiece with our demonstration equipment. Please feel free to contact us when you need our services.
