True Nano Tech Thin High-Rigidity Stage
The XY stage system by ALIO Industries has made an impact on high-end stage manufacturers worldwide with its three-plate design. Unlike the conventional method of combining single axes, this integrated XY-axis design successfully achieves both high precision and high rigidity, making it a hallmark stage of ALIO Industries.
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basic information
■Thin, high-rigidity design with three plates By orthogonally arranging high-precision cross rollers on both sides of the middle plate, we achieve high precision and high rigidity with a thin design. Regardless of the stroke, we realize a repeatability accuracy of ±30nm with next-generation standard 6D Point Precision. ■Standard upgrade with Ultra/Nano options A variety of upgrade options are available. Improved accuracy through laser mapping and enhancements to structural components. ■Adoption of high-performance motors/optical encoders By using top-tier products from leading manufacturers in Europe and the U.S., we achieve not only precision but also high reliability. MTBF > 100,000 hours. ■Compatible with various stages and direct assembly Over 400 types of stages can be directly mounted without the need for adapter plates. This results in a multi-axis stage system compliant with 6D Point Precision. ●For more details, please contact us or download the catalog.
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■ Manufacturing and sales of laser equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of electrical and electronic equipment and its application devices and parts, as well as import and export operations ■ Sales of optical equipment and its application devices and parts, as well as import and export operations ■ Manufacturing and sales of medical, physical, and measuring instruments and their application devices and parts, as well as import and export operations ■ Manufacturing and sales of adhesives, adhesive tapes, adhesive sheets, and their equipment and devices, as well as import and export operations ■ All operations incidental to the above items