We have reduced the burden of daily inspections. The gas detection unit has been made smaller, lighter, and features an LCD display for better visibility.
●Stationary semiconductor material gas detection unit with replaceable sensor unit ●Calibrated sensor units are delivered and can be replaced on-site, eliminating the need for gas calibration in the field ●Compatible with NF3 detection ●Supports Modbus (RS-485/Ethernet) *Ethernet communication is compatible with PoE ●Complies with CE standards and SEMI standards
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basic information
● Automatic control of sampling flow rate with clogging alarm function (patent registered) No need for flow checks during routine inspections. Even if the piping resistance increases due to filter clogging, it automatically returns to the specified amount. An alert will be issued in case of clogging. ● Clear status display with LCD The LCD display clearly shows the gas concentration during use, alarm status, error messages, etc. The condition of the equipment is easily understood at a glance.
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Gas detection alarm
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