Easy discharge operation! Compact design featuring automatic matching for RF power supply.
The "FRS-HG Series" is a multi-source simultaneous magnetron sputtering device equipped with simultaneous sputtering functionality for 2 sources or 3 sources, designed for research and development. Despite being a fixed type, it features a compact and stylish design. There are three film source introduction ports available, allowing for the installation of film sources that can synergize with sputtering, such as sputtering cathodes and arc plasma deposition sources. 【Features】 - Compact and stylish design despite being a fixed type - Auto-matching is employed for the RF power supply, making discharge operation easy - Simultaneous film deposition from 2 or 3 sources allows for fine-tuning of thin film functions and performance *For more details, please refer to the PDF materials or feel free to contact us.
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basic information
【Specifications】 ＜FRS-HG-2CP260T Sputtering System＞ ■ Sputtering Power Supply: RF300W x 2 units with automatic matching ■ Cathode: φ2 inch / Magnetron Cathode ■ Applicable Targets: Au/Ag/Pt/Pd/Ni/Cu/W/Cr/Ti/Ta/Mo/Various Oxides/Various Nitrides ■ Vacuum Exhaust System: Turbo Molecular Pump + Rotary Pump ■ Vacuum Gauge: Full Range Gauge ■ Gas Flow Adjustment: MFC for Argon 50 sccm *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
[Applications and Achievements] ■ Development of electronic devices, solid nanostructure devices, various sensors, and various batteries. *For more details, please refer to the PDF document or feel free to contact us.*
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FKD Factory Co., Ltd. will assist you in bringing your ideas to life. "I want to create a new type of device." "I want to advance my research stage and consider new experimental equipment and materials." "I want to independently develop a device and aim for commercialization." We will propose concrete directions based on your spontaneous ideas, leveraging our extensive experience and unique perspective. There are no limitations. We support cutting-edge research and manufacturing with free-thinking creativity.
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