[Book] Trends in Advanced Semiconductor Manufacturing Processes and Miniaturization (No. 2220)
2220 Semiconductor Manufacturing Process
[Available for preview] - Film formation technology, lithography, etching, CMP, cleaning -
Book Title: Latest Trends in Advanced Semiconductor Manufacturing Processes and Miniaturization Technologies Amidst the calls for the limits of Moore's Law, how far will the development of miniaturization technologies continue? A comprehensive book covering the latest technologies in the "front-end" of advanced semiconductor manufacturing, where new structures and materials are being applied. Key Points of This Book: - Latest trends in EUV lithography and technical challenges related to resists, masks, and light sources. - Development history and future challenges of metal resists that break conventional wisdom. - Recent development cases of atomic layer processes (ALD, ALE) that are rapidly gaining momentum in research and development. - Latest trends in nanoimprint systems aimed at mass production applications for next-generation semiconductor memory devices. - Latest trends in film deposition technologies and process optimization in semiconductor multilayer wiring. - Cleaning performance required for advanced semiconductor manufacturing, the reality of contamination, and the latest cleaning technologies. - Latest technologies and process control for high aspect ratio etching that enables the miniaturization of integrated circuits. - CMP processes and consumable materials that respond to advancements in miniaturization and new materials, along with required performance for post-cleaning.
Inquire About This Product
basic information
■ Table of Contents Chapter 1: Polishing and Processing Technologies for Semiconductor Wafers and Ion Implantation Chapter 2: Trends in Film Formation Technology and Production of High-Quality Thin Films Chapter 3: Trends in the Development of Resist Materials and Coating and Removal Technologies Chapter 4: Trends in the Development of Next-Generation Lithography Technologies and Miniaturization Techniques Chapter 5: Trends in the Development of Dry Etching Technologies and Process Control Chapter 6: Trends in the Development of Wet Etching Technologies Chapter 7: Trends in the Development of CMP Processes and Analysis and Evaluation Techniques Chapter 8: Cleaning Technologies for Semiconductors, Mechanisms, and Analysis and Evaluation Techniques －－－－－－－－－－－－－－－－－－－－－ ● Publication Date: September 29, 2023 ● Format: A4, 630 pages ● Authors: 58 individuals ● ISBN: 978-4-86104-982-8 －－－－－－－－－－－－－－－－－－－－－
Price information
88,000 yen (including tax) [shipping included] Various discount programs are available. Please contact us.
Price range
P2
Delivery Time
P2
Applications/Examples of results
For more details, please contact us.
catalog（1）
Download All Catalogs![[Book] Latest Trends in Advanced Semiconductor Manufacturing Processes and Miniaturization Technology (No. 2220)](https://image.www.ipros.com/public/catalog/image/01/f01/728996/IPROS40817374847559636116.jpeg?w=120&h=170)
News about this product（1）
Company information
The Technical Information Association works to shape information for engineers and researchers. We research what kind of information engineers and researchers active in fields such as "research and development," "materials," "electronics," and "pharmaceuticals/medical devices" need, and create products such as seminars, books, and distance learning courses!
![[For Beginners] The Structure of an SDR Organization to Strengthen Corporate Sales](https://image.www.ipros.com/public/product/image/2116845/IPROS8002888076560131425.png?w=280&h=280)
