[Book] Latest Trends in Advanced Semiconductor Manufacturing Processes and Miniaturization Technology (No. 2220)

- Film formation technology, lithography, etching, CMP, cleaning -
★ Amid calls for the limits of Moore's Law, how far will the development of miniaturization technology continue!?
A comprehensive book covering the latest technologies in advanced semiconductor manufacturing "front-end processes" with the application of new structures and new materials.
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■ Table of Contents
Chapter 1: Polishing, processing technology of semiconductor wafers, and ion implantation
Chapter 2: Development trends in film formation technology and production of high-quality thin films
Chapter 3: Development trends in resist materials and coating, removal technologies
Chapter 4: Development trends in next-generation lithography technology and miniaturization technology
Chapter 5: Development trends in dry etching technology and process control
Chapter 6: Development trends in wet etching technology
Chapter 7: Development trends in CMP processes and analysis, evaluation technologies
Chapter 8: Semiconductor cleaning technology, mechanisms, and analysis, evaluation technologies
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● Publication Date: September 29, 2023 ● Format: A4, 630 pages
● Authors: 58 individuals ● ISBN: 978-4-86104-982-8
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