Tohoku Univ. Technology：Room temperature deposition of oxide solid ionic films：T22-111

Thin film deposition technology by plating oxide solid ion battery

　We have developed a technology to deposit solid-state ionic films used in solid oxide secondary batteries at room temperature by electroplating. This technology makes it possible to integrate small solid-state ionic batteries, which has been difficult until now. Some oxide solid-state ionic batteries are fabricated by powder sintering or sputtering, but they require a high temperature process, so the separation by thermal stress is a problem. The present invention provides a technique for depositing a solid ionic film (Cathode electrode and solid electrolyte films) by electroplating without requiring a high temperature process. 　The films of the cathode active materials and solid electrolytes were successfully deposited and patterned by electroplating at room temperature. In addition, an ionic solid-state battery was fabricated using this technology, and its operation was confirmed (right figure).

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