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  6. High-sensitivity and fast-response humidity sensor (Shinshu University Faculty of Engineering)

High-sensitivity and fast-response humidity sensor (Shinshu University Faculty of Engineering)

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last updated:Jun 04, 2026

信州TLO
信州TLO
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It is a capacitive humidity sensor that is 100 times faster than conventional commercial products!

This is a capacitive humidity sensor that combines polyimide with excellent heat resistance and chemical stability and MWCNT (multi-walled carbon nanotubes) + SWCNT (single-walled carbon nanotubes), achieving a response time on the order of 10 ms, which is 100 times faster than conventional sensors. Carbon nanotubes (CNT) have a nanoscale mesh structure, making them gas-permeable electrodes. It is also important that the upper electrode does not hinder the movement of gas molecules; for example, in the case of a humidity sensor that permeates water vapor, high hydrophobicity can be expected to enable a fast response. This technology improves response speed, sensitivity, temperature change suppression, and durability by attaching CNTs as the upper electrode to a thin film of polyimide, whose electrical properties change due to water vapor or gaseous chemicals, compared to conventional humidity sensors.

    Gas leak device
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High-sensitivity and fast-response humidity sensor (Shinshu University Faculty of Engineering)

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  • Related Link - https://shinshu-tlo.co.jp/technology/seng-0028/

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basic information

MW+SWCNT electrode - It has a mesh structure → gas molecules such as water vapor can pass through easily - MW+SWCNT has better hydrophobicity than Au → good desorption of water molecules → improved response speed

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Applications/Examples of results

- By achieving a high-speed response of humidity sensors and suppressing temperature changes, real-time control of air conditioning and cooking equipment is realized. - Application is also expected in the automotive sensors and medical devices fields, where high-speed response is essential.

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信州TLO

信州TLO

Educational and Research Institutions

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