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  6. Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera ALEX-i

Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera ALEX-i

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Greateyes「ALEX-i」

last updated:Apr 13, 2023

ケイエルブイ
ケイエルブイ
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Ultra-high sensitivity CCD camera corresponding to the VUV, EUV, soft X-ray, and hard X-ray regions.

This is a super high-sensitivity CCD camera that corresponds to the VUV, EUV, soft X-ray, and hard X-ray regions. It achieves a high signal-to-noise (SN) ratio through high-sensitivity CCD and cooling technology. It is capable of detecting extremely weak signals that cannot be measured with CMOS cameras. ■ Super High Sensitivity The CCD sensor achieves a high quantum efficiency of up to 98%, allowing for the measurement of weak signals. It realizes a high dynamic range with 18-bit digital output, enabling simultaneous measurement of strong and weak signals. The TE cooling system, which cools down to -100°C, achieves an extremely low dark current of 0.00015 e-/pixel/s. ■ High Performance as a Camera It can read out at a maximum frame rate of 5 MHz. It is equipped with multiple interfaces including GigE and USB 3.0. Software and SDK for the camera are provided. ■ Ideal for Use in Vacuum Equipment It is compatible with CF flanges DN63, DN100, and DN160, making it easy to install in vacuum equipment. The design and materials of the camera provide resistance to 80-degree baking, allowing for use in UHV (Ultra High Vacuum) environments.

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ALEX-i-1k1k.jpg

Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera ALEX-i

ALEX-i-1k1k.jpg
ALEX-i-1k1k.jpg
  • Related Link - https://www.klv.co.jp/product/euv-xray-camera/alex…

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basic information

■Product Model Greateyes' ALEX series offers four lineups based on resolution: 1k1k 2k2k 2k2k plus 4k4k Additionally, for each lineup, you can choose from the following CCD sensor types based on your application: - Front-illuminated CCD (FI) - Back-illuminated CCD (BI) - Fringe suppression consideration deep depression type CCD (BI DD) - Back-illuminated CCD [high sensitivity type] (BI UV1)

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Applications/Examples of results

EUV lithography X-ray tomography Fourier transform holography X-ray fluoroscopy Coherent diffraction imaging X-ray tycho-graphy Grazing incidence small-angle X-ray scattering (GISAXS)

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Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera_ALEX-i / LOTTE-i Product Catalog

Ultra-high sensitivity VUV, EUV, X-ray compatible CCD camera_ALEX-i / LOTTE-i Product Catalog

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SEMICON Japan 2024 Exhibition

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Event Date: December 11 (Wednesday) to December 13 (Friday), 2024 Venue: Tokyo Big Sight, East Exhibition Hall, Hall 7 Featured Products: - Mask aligners, peripheral exposure, high-power LED irradiation devices for steppers - Semiconductor surface inspection equipment - Hyperspectral camera capable of video recording - Compact spectrometer - LPP-EUV light source - Laser-excited white light source (190–2500nm) - Ultra-high sensitivity CCD camera for VUV and X-ray regions - Plasma source - SC light source (supercontinuum light source)

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KLRB has been uncovering cutting-edge optical components from around the world and supporting the development of various optical technologies, particularly in the fields of medical, environmental, and analytical applications. With the theme "SOLUTION FOR OPTICAL SYSTEM DEMANDS," we are actively building and expanding our optical solution business. We aim to respond to our customers' increasingly sophisticated and diverse needs more swiftly and accurately than anyone else, becoming a company that contributes to both business and society. As a "specialized trading company proposing the utilization of optical energy," we invite you to look forward to our unique and promising optical solutions that will pave the way for a new era of light.

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