Technical Data: Possibilities of Thin Film Production Using Excimer Lamps

Utilizing high-output xenon excimer lamps! An introduction to the film deposition rate of the light CVD method.

By forming a thin film on the surface of metals and polymer materials, it is possible to control the mechanical, thermal, chemical, and electrical properties of the material's surface. Various methods are employed for the thin film deposition used in this surface modification, including vacuum deposition, PVD, and plasma CVD methods. It is expected that the exploration and development of new deposition methods will continue in the future. In this document, we present the results of our examination of the potential for a thin film manufacturing process using a "high-output xenon excimer lamp." [Contents] ■ Introduction ■ Film deposition rate using light CVD method with "high-output xenon excimer lamp" ■ Conclusion *For more details, please refer to the PDF document or feel free to contact us.

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