Realization of light intensity of 1-2 kW/m²! Examination of the essential technological elements for high output.
Around the end of the 1980s, high-brightness vacuum ultraviolet lamps utilizing excimer emission were developed. For example, excimer lamps using xenon gas can produce vacuum ultraviolet light at a wavelength of 172 nm with a high light intensity of 100 W/m², and they are actively applied in processes such as photodecomposition cleaning and photomodification of material surfaces. In this presentation, we examined the necessary technological elements for achieving a light intensity of 1-2 kW/m², which is 10 to 20 times brighter than conventional lamps. [Contents] - Principles of excimer lamps and research and development objectives - Discharge methods - Lamp shapes *For more details, please refer to the PDF document or feel free to contact us.
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Quark Technology Co., Ltd. manufactures and sells various industrial equipment utilizing cutting-edge optical application technology. Through the development of vacuum ultraviolet and UV-LED light sources, we have introduced manufacturing technologies for semiconductor production, as well as new displays such as LCDs, PDPs, films, and EL, along with various electronic materials and devices. Additionally, we are planning research and development to address the demand for waste and environmental management equipment, which are pressing medical and social issues. All substances are composed of atoms, nucleons, and "quarks." At Quark Technology, we continue to research light and challenge ourselves in industrial application technologies.