[Case Study] Proposal for a prism that maintains high reflectivity even when dirt adheres.

Achieve nanometer-level precision in optical components! Realize high reflectivity unaffected by surface conditions!

We were requested by a semiconductor manufacturer to analyze samples of prisms used in integrated circuit manufacturing equipment sensors. Upon conducting an analysis with arbitrary oil and grease (contaminants) applied, it was found that the presence of contaminants disrupted the total reflection conditions, resulting in a loss of light intensity. In the event that contaminants adhere, it could lead to a decrease in detection accuracy and potentially cause process defects, making urgent improvements necessary. Therefore, we proposed a prism equipped with a high-reflective mirror that maintains high reflectivity even if contaminants adhere, called the "Prism with Induced Multi-layer Film Mirror." We received high praise from the semiconductor manufacturer, and it was adopted immediately. [Case Overview] ■ Issue: Contaminants on the reflective surface affect and reduce reflectivity. ■ Solution: Maintains high reflectivity even with contaminants, contributing to the quality assurance of precise semiconductor manufacturing. ■ Featured Product: Prism *For more details, please refer to the PDF document or feel free to contact us.

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