[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment

Measures taken with the air servo active vibration isolation system! A good vibration environment has been established across all frequency ranges.

We would like to introduce a case study on active vibration isolation measures for liquid crystal substrate inspection equipment. During the installation of a large liquid crystal substrate inspection device (length measuring machine), a preliminary survey of the vibration environment of the installation floor revealed that it exceeded the allowable limits. This length measuring machine observes the line width of patterns optically and is sensitive to the vibration environment, so we implemented measures using an air servo active vibration isolation device. After the active vibration isolation measures were taken, we cleared the vibration allowable limits of the device and were able to establish a good vibration environment across all frequency ranges. [Case Summary] ■ Issue: A preliminary survey of the vibration environment of the installation floor for a large liquid crystal substrate inspection device (length measuring machine) revealed that it exceeded the allowable limits. ■ Measures: Installation of an air servo active vibration isolation device. ■ Effect: Cleared the vibration allowable limits of the device and established a good vibration environment across all frequency ranges. *For more details, please refer to the PDF document or feel free to contact us.

Monitoring and Control EquipmentEarthquake-proof and vibration-damping equipment