[Labor Accident Case] Poisoning during maintenance work on semiconductor manufacturing equipment.
Introducing a case of poisoning that occurred during maintenance work on semiconductor manufacturing equipment.
After a meeting regarding the baking and oxidation work conducted by the semiconductor manufacturer for maintenance, harmful substances were detected using a detection tube while measuring the residual harmful substances in the semiconductor manufacturing equipment. During this process, the harmful substances leaked, and the individual was affected while passing by the equipment. The affected person, after resting in the office for about an hour due to feeling unwell, received a consultation from the manufacturer's industrial physician. Following the industrial physician's instructions, they went to a university hospital for further examination, where they were diagnosed with acute drug poisoning and required a four-day hospitalization. 【Suggestion】 ■ It is recommended to use gas monitors to check environmental concentrations before work, confirm leakage during work, and verify restoration to original conditions after work. *For more details, please refer to the PDF document or feel free to contact us.
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【Case Summary】 ■Location of Incident - During maintenance work on semiconductor manufacturing equipment ■Countermeasures - Ensure that harmful substances can be detected without opening the equipment doors - Consider automating the detection system so that harmful substances can be detected without opening the doors of the equipment *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Riken Keiki Co., Ltd. was established as a company within the "Riken Foundation" conglomerate and has since focused on the scientific and technological advancements of the Riken Institute. As a specialized manufacturer of industrial gas detection and alarm equipment, we have worked to ensure industrial disaster prevention safety by preventing explosions caused by flammable gases and monitoring harmful gases in the workplace. Moving forward, we aim for zero loss of precious human lives and valuable assets, further strengthening our technological development capabilities. We will supply high-quality industrial gas detection and alarm equipment, as well as various excellent gas sensors, to countries around the world, contributing to the assurance of industrial disaster prevention safety.