Free circular coating with a unique slit die! A new product has arrived to replace the Spiral Coater!
The "RS Coater" is a device that allows for free circular coating using a unique slit die. In addition to circular shapes, it can achieve free coating shapes that are not dependent on substrate shapes such as squares and octagons. The time required for coating a φ300mm wafer is only 30 seconds, boasting high throughput and achieving excellent quality without bubbles. 【Features】 ■ Capable of thick film coating of high-viscosity liquids (thick coatings of several hundred micrometers can be applied in one go) ■ Excellent embedding capability for patterns (with few voids) ■ No need for EBR (Edge Back Rinse), reducing the number of processes ■ Achieves overwhelming liquid-saving (the amount of coating liquid used is less than one-third of that of a spin coater) ■ Significantly reduces the amount of cleaning liquid and waste liquid, enabling more eco-friendly production ■ Capable of coating irregular materials and shapes We also offer system proposals. Example process flow: Load Port (EFEM) → Alignment → Coater → BAKE → CP → Load Port (EFEM) Drying Process Option: VCD (Vacuum Drying Device) Firing Process Option: Can be combined with Cure Ovens and others *For more details, please refer to the PDF document or feel free to contact us.
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basic information
【Specifications】 ■Wafer size: 4 to 18 inches (φ450mm) ■Viscosity: 500 to 15,000 mPa·s (cps) ■Coating film thickness: 50 to 200 μm/Wet ■Film thickness accuracy: within ±3% ■Coating liquid usage efficiency: over 90% *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Company information
Since its founding in 1945, Chugai Ro Co., Ltd. has been advancing as a technology-driven company that creates innovative technologies in the field of thermotechnology. Our core competencies lie in our development and design capabilities. However, as the engineering environment in the market matures, we have determined that it will be difficult to achieve clear differentiation from other companies solely through technological prowess. Therefore, we have been promoting the "integration of engineering and manufacturing technology." Specifically, by consolidating the functions of development, design, and production in one location, we aim to enhance the sharing and refinement of know-how across departments and functions, facilitate information exchange for process reconstruction, and optimize domestic and international design, procurement, and production bases. We have also introduced advanced design and analysis tools and obtained ISO 14001 certification in addition to ISO 9001. We believe that these multifaceted improvements, both soft and hard, will elevate our manufacturing company to a higher level and maximize our capabilities. Thermotechnology, which uses energy more efficiently, is in high demand not only in the industrial sector but also in general households. Moving forward, we are committed to fully embracing the significant expectations and responsibilities placed upon us in our field and responding with the unique innovative technologies that only Chugai Ro Co., Ltd. can provide.