DLC film formation (film quality: ta-C domain, surface roughness Ra 0.16 nm, transmittance: 88%) achieved through sputtering, which has had many challenges in the past.
The RAM CATHODE (four-sided opposing cathode) dramatically improves the ionization rate, enabling the formation of DLC (ta-C) using a DC pulse power supply without the need for HIPIMS power. 【Conventional Sputtering Method】 Due to the low ionization rate of carbon, it was necessary to use HIPIMS power to forcibly increase the ionization rate in order to obtain the ta-C region. 【RAM Cathode Developed by Our Company】 By arranging targets on four opposing sides, the magnetic field between the targets enhances plasma confinement, allowing for the formation of high-density plasma. Within the confined plasma, electrons, rebounding argon, and C flux repeatedly collide, promoting the ionization of Ar ions and C flux, which facilitates the easy formation of C-C bonds in the DLC film. As a result, we have achieved the formation of high-hardness and high-smoothness DLC without using HIPIMS power. *For more details, please refer to the PDF document or feel free to contact us.
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basic information
**Features** - DLC Formation: The ionization rate is higher than that during formation using conventional sputtering methods. - In a plasma confined by a four-sided target, electrons, rebounding argon, and C flux repeatedly collide with each other, promoting the ionization of Ar ions and C flux. C+ promotes ionization at high energy due to ion collisions, making it possible to easily form C-C bonds in the DLC film. - Improvements in "transmittance," "hardness," and "surface roughness."
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Applications/Examples of results
【Examples of Use】 Smartphone cover glass Food film Medical fabric/polymer Syringes and drug containers Artificial joints Infrared cameras and infrared sensors Etc.
Company information
Keihin Ramtech was founded in 1972 and has become a trusted manufacturer in the LCD and semiconductor manufacturing equipment industry as well as the automotive industry. At our company, we believe that continuous technological development is the responsibility of all employees. The unique technologies possessed by Keihin Ramtech are utilized as core technologies across various industries. As a proposer that continues to develop and propose innovative technologies expected to further advance in the future, we will contribute to our customers' further development.
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