We will introduce a wide range of equipment that performs consistent processing from development, washing, to drying.
We would like to introduce our "Paddle Development Equipment." The purpose of the development process is to dissolve unnecessary resist and leave only the required pattern portions of the resist. We offer a lineup that includes "Paddle Development Equipment" suitable for use in a Class 1000 cleanroom, as well as "Vertical Transport Development Equipment" and "Sheet and Horizontal Transport Development Equipment." By maintaining optimal conditions such as developer concentration, liquid temperature, and liquid replenishment, quality is stabilized. We also propose chemical supply equipment as needed when designing development machines. 【Product Lineup】 ■ Paddle Development Equipment ■ Vertical Transport Development Equipment ■ Sheet and Horizontal Transport Development Equipment ■ Dip Development Equipment ■ Hanger Development Equipment ■ Manual Development Machines, etc. *For more details, please refer to the related links or feel free to contact us.
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basic information
【Paddle Developer Features】 ■ Performs spray development and pure water rinsing while vacuum-sucking and spinning the wafer at high speed. ■ Capable of integrated processing from development to pure water washing and drying. ■ Usable in a Class 1000 clean room. *For more details, please refer to the related links or feel free to contact us.
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Applications/Examples of results
【Usage】 ■Development *For more details, please refer to the related links or feel free to contact us.
Company information
◆Glass Etching machine ◆Resist Coating | Developing Machine | Metal Etching | Resist Stripping | Cleaning machine ◆Electropolishing machine ▼▼▼Our Strengths▼▼▼ ◎Glass Etching Precision Achievable in glass substrates with a work size of 1500×1850mm, with a post-processing in-plane thickness precision of R10μm or less. ◎Thin Sheet Transport Mechanism We possess multiple know-hows for transporting thin sheet workpieces, both metal sheets and glass substrates, without causing damage. ◎Material Selection The selection of materials for the equipment is a critical task related to safety, environment, and quality. We conduct evaluation tests using chemical solutions as necessary and take responsibility for the selection. ◎Prototype Processing Available We can process samples using not only water but also chemical solutions (acidic chemicals, alkaline chemicals, organic solvents). You can purchase the equipment with confidence after verification and evaluation.