Contributes to understanding the RF status when the process is successful and analyzing the causes of process failures!
"BDS2" is an RF power monitoring system for non-50Ω lines. In semiconductor manufacturing processes that require RF reproducibility, it can be used not only as a constant monitoring tool for RF but also allows for the measurement of current, voltage, and phase angle, making it possible to manage the RF state after the matching box for each chamber. By utilizing log data and a simple spectrum measurement function, it also contributes to understanding the RF state during successful processes and analyzing the causes of process failures. 【Features】 ■ Monitors current, voltage, and phase angle in non-50Ω lines, with RF effective power and impedance analysis using Smith charts ■ Spectrum analysis using frequency sweep function, analysis of harmonic and noise components ■ Built-in trigger function allows for capturing arcs and pulse rise times without missing them, suitable for process analysis and quality assessment ■ Optional time domain function allows monitoring of up to 4 levels of pulse waveforms *For more details, please refer to the related link page or feel free to contact us.
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basic information
【Measurement Functions】 ■ Tracking Mode (Pulse output measurement is also possible) ■ Spectrum Measurement Mode ■ Time Domain Mode (Pulse waveform monitoring function) *For more details, please refer to the related link page or feel free to contact us.
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Applications/Examples of results
【Demo Case】 ■Is there a difference between chambers? ■Loss of the matching box *For more details, please refer to the related link page or feel free to contact us.
Company information
Marubun is an "electronics trading company" that handles cutting-edge semiconductors, electronic components, and electronic application devices. It operates globally from approximately 50 locations around the world, providing products and services from over 800 suppliers to more than 3,000 customers. The business is promoted through a structure of three business segments: Device Business, System Business, and Solution Business.
