Equipped with a heater stage (1000℃)! Usable for various applications from development to mass production processes.
The S600 is a multilayer sputtering device that contributes to the enhancement of electronic component quality and productivity through improvements in multilayer and laminated film deposition processes. By achieving high-quality and high-precision film deposition, it enhances device quality. It increases cost competitiveness through high throughput, improved production yield, and optimized material utilization efficiency. With options that accommodate a variety of film deposition conditions, it is capable of supporting small-batch production and flexible production planning. 【Features】 ■ Supports diverse processes and high productivity with up to 5 cathodes ■ Maintains long-term uniformity of film thickness through T/S distance adjustment ■ Improves sputtered thin film characteristics with unique plasma control (MP sputtering) technology ■ Capable of high-temperature processes with a heater stage (1000°C) ■ Usable for various applications from development processes to mass production *For more details, please refer to the PDF document or feel free to contact us.
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【Other Features】 ■ Achieves high productivity with a double load lock chamber ■ Combines rotary type and multi-chamber type for a transport form that balances responsiveness to diverse processes and high throughput ■ Various units can be mounted at each position ■ Supports processing of 3 to 6-inch substrates (also compatible with mixed production of various types) ■ Achieves high precision film thickness uniformity and extended target lifespan through large diameter wide erosion with an eccentric rotating magnet ■ Magnetic field design is simulated and tailored to meet customer requirements as much as possible * For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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Our company is engaged in mechanical design, software development, parts processing, manufacturing, startup support, maintenance and services, as well as engineering and system development aimed at solving challenges in manufacturing for the Panasonic Group's production facilities. We provide solutions that combine the accumulated technologies developed in the Manufacturing Innovation Division with Panasonic's production technology know-how across five business areas. Please feel free to contact us if you have any inquiries.
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