Evaluation of membrane quality using EELS analysis method

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last updated：Aug 21, 2020

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EELS analysis for element identification allows for the comparison of the bonding states of substances!

Our company provides analysis and reliability evaluation services. EELS analysis and EDS analysis are analytical methods that identify elements by irradiating accelerated electrons onto TEM samples. In the case of "different carbon films," we conducted film quality evaluation in the nano region using the EELS analysis method, which is characterized by state analysis. In the EDS analysis, we detected trace amounts of N and O only in the Bottom film through spectral comparison. In the EELS analysis, the difference in shoulder shapes of the two spectra allows for a comparison of the bonding states of N, O, and C present in the organic film. *For more details, please refer to the PDF document or feel free to contact us.

Related Link - https://www.ites.co.jp/analyze/index.html

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**Comparison of EELS Analysis and EDS Analysis** <EELS> ■ Parameters used for analysis: Energy loss electrons ■ Energy resolution: Below 1 eV ■ Advantages: State analysis, light element analysis (Li, B) ■ Disadvantages: Difficult to analyze a wide range of elements simultaneously ■ Measurement time: 5 seconds ■ TEM sample thickness: Approximately 50 nm or less <EDS> ■ Parameters used for analysis: Characteristic X-rays ■ Energy resolution: Around 100 eV ■ Advantages: Analysis of all elements ■ Disadvantages: Difficult to separate peaks of elements with close energy ■ Measurement time: 30 seconds ■ TEM sample thickness: Approximately 300 nm or less *For more details, please refer to the PDF document or feel free to contact us.*