We will contribute to improving yield and optimizing processes through drug solution concentration management.
The "CS-900" is a non-contact chemical concentration monitor that achieves high functionality suitable for on-site needs, with stable measurement accuracy and a unique piping retention structure designed with safety in mind, to meet the stringent chemical concentration management required in semiconductor manufacturing processes. Thanks to its unique sensor structure that directly attaches to PFA piping, the contamination risk is reduced to "zero." Additionally, it eliminates the need for piping installation during sensor attachment, thereby removing the risk of accidents such as chemical leaks. 【Features】 ■ Improved installation layout flexibility due to optical design that does not use fiber optics and miniaturization of the amplifier and sensor ■ Achieves complete non-contact measurement with high stability ■ Enables direct and stable measurement of chemicals (20°C to 80°C) ■ Easy to install and remove *For more details, please download the PDF or contact us.
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【Specifications】 ■ Measurement Principle: Absorption Spectroscopy ■ Concentration Calculation Method: Temperature Compensated Multivariate Analysis ■ Measurement Conditions 1) Measurement Cycle: Approximately 3 seconds 2) Moving Average: 16 times ■ Piping (static electricity prevention type not allowed): PFA piping 1 inch or 3/4 inch ■ Power Supply: DC24V ■ Power Consumption (excluding transient current at startup): Approximately 30W *For more details, please download the PDF or contact us.
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Horiba Advanced Techno Co., Ltd. is a group company of Horiba Ltd., a manufacturer specializing in analytical instruments, and is an expert company in sensing technology in the fields of environmental measurement and semiconductor cleaning. Aiming to be the de facto standard in water measurement, we will fulfill our role as an ecological leader in creating a comfortable environment, so please feel free to contact us if you have any requests.