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ISBN978-4-86043-559-2

last updated:May 24, 2019

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Condensing 30 years of progress from the previous edition, covering everything from fundamentals to applications and practical use. To be useful in practical work, numerous charts and diagrams are included to illustrate applied technology examples.

"Latest Practical Vacuum Technology Encyclopedia" Published: February 2019 Price: 58,000 yen + tax Format: B5 size, 1096 pages Published by: NTS Corporation ISBN: 978-4-86043-559-2 C3043 Editor: Latest Practical Vacuum Technology Encyclopedia Editorial Committee Chairman: Hideaki Kasai (President of Akashi National College of Technology / Emeritus Professor at Osaka University) Contributors: 157 authors in total

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■Table of Contents Part 1: Fundamentals of Vacuum Engineering Chapter 1: Properties of Rarefied Gases Chapter 2: Vacuum Pumps Chapter 3: Vacuum Measurement Instruments Chapter 4: Vacuum Components Chapter 5: Vacuum Materials Chapter 6: Handling of Vacuum Equipment Chapter 7: Environmental, Safety, and Health Measures and Maintenance Part 2: Vacuum Application Systems Chapter 1: Utilization of Low and Medium Vacuum Chapter 2: Processing of Metallic Materials Chapter 3: Thin Films Chapter 4: Molecular Beam Technology Chapter 5: Surface Analysis Chapter 6: Large Vacuum Systems Chapter 7: Next-Generation Advanced Science and Technology Driven by Vacuum Chapter 8: Environmental, Safety, and Health Measures and Regulations Chapter 9: Computational Physics

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Vacuum pump, vacuum gauge, vacuum equipment Vacuum application system, metal materials, thin films, molecular beams, surface analysis

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