Suppresses wafer contamination and contact failure caused by siloxane gas! Siloxane content of 5μm or less in fluororubber-based paste sealant "HVF-1"!
The siloxane-free paste sealant "HVF-1" has a siloxane content of less than 5μm, which helps to suppress damage caused by siloxane. By preventing "wafer contamination," "contact failure," "corrosion of metal parts," "the generation of foreign substances due to chemical reactions," and "contamination of exposure device lenses" caused by siloxane, it can be used for sealing gaps inside clean rooms and for joint sealing inside semiconductor manufacturing equipment. 【Features】 ■ Resistant to both acids and alkalis ■ Air dries at room temperature ■ Main raw material is fluororubber that does not contain silicone, etc. *Free samples are available. *For more details, please download the PDF or contact us.
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basic information
For more details, please download the PDF or contact us.
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Applications/Examples of results
【Applications】 - Sealing of joint surfaces such as piping flanges - Sealing of duct joints - Sealing and repair for chemical etching devices and semiconductor cleaning equipment - Sealing in situations where siloxane is not suitable, such as in painting, optics, and precision instruments - Alternative sealing material for equipment and devices requiring heat and chemical resistance, where silicone materials cannot be used, for sealing and repair purposes, etc.
Detailed information
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HVF-1 coating immediately after application
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After the HVF-1 coating has dried
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We also develop special sealants and coatings individually, so please feel free to consult us if you have any concerns.