For exploring optimal conditions! Here are examples of utilizing multi-dimensional display charts!
We will introduce a case study of exploring optimal conditions for the etching process, coupled with the detailed chemical reaction analysis program CHEMKIN. In the problem setup, we varied the raw gas supply amount (SCCM) and oxygen concentration to find the operating point where the outlet C2F6 concentration and CF4 concentration are minimized, while maximizing the etching rate (minimizing the film formation rate). As a result of the calculations, it became clear that there is a trade-off relationship between C2F6 concentration and etching rate. Subsequently, we successfully extracted preferred solutions from the multidimensional display chart of "modeFRONTIER." [Case Study] ■ Software Used: modeFRONTIER, CHEMKIN ■ Objective: Exploration of optimal conditions for the etching process ■ Effect: Comparison of preferred solutions using a multidimensional display chart *For more details, please refer to the external link or feel free to contact us.
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**Features of the Multi-Objective Robust Design Optimization Support Tool "modeFRONTIER"** - Equipped with advanced optimization methods, experimental design methods, and response surface approximation methods - Supports multi-objective robust design optimization and multi-objective tolerance design optimization - Includes a variety of post-processing functions such as statistical analysis, multivariate analysis, and CAP - Interface compatible with Japanese (Windows) and English environments - Standard equipped with dedicated nodes for direct access to various tools (such as CATIA V5, ANSYS Workbench, MATLAB, LabVIEW, etc.) *For more details, please refer to the external link or feel free to contact us.*
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While focusing on MBD and CAE technologies and their surrounding technical areas, we specialize in building virtual products and collaborative design processes through cutting-edge digital engineering. We form partnerships with leading-edge software vendors of the era, providing a comprehensive engineering environment necessary to solve our customers' increasingly diverse and complex challenges using top-level domestic digital engineering technologies, including thermal fluid analysis, structural analysis, electromagnetic field analysis, acoustic analysis, system simulation, optimization technologies, embedded software development environments, and simulation process data management (SPDM) solutions.
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