Support for high-purity gas purification technology and trace gas impurity measurement technology!
Our company supports high-purity gas purification technology and trace gas impurity measurement technology using 'API-MS' in the fields of semiconductor manufacturing, organic EL manufacturing, and advanced research. As for our track record in piping construction, we have gas supply equipment for the next-generation detector XMASS at Kamioka and a gas sampling system for JAXA's Hayabusa II return chamber. Additionally, the 'API-MS' method has been registered with ISO as a high-sensitivity gas permeability evaluation device for films. *For more details, please download the PDF or contact us.
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[Related Products] ■ Film Gas Permeability Evaluation Device 'API-BARRIER' *For more details, please download the PDF or contact us.
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Our company wishes for the further development of the Atmospheric Pressure Ionization Mass Spectrometry (APIMS) and provides services related to high-sensitivity gas analysis technologies centered around APIMS. We handle high-sensitivity gas analysis equipment such as the "FLEX-MS400," film permeability evaluation devices (registered as an inspection method under ISO), and temperature-programmed desorption gas measurement devices. It is used for monitoring high-purity nitrogen gas in the curation facilities for opening the capsules of Kamiokande's XMASS and JAXA's Hayabusa2 (planetary material sample acceptance facilities).