It is a compact automatic transport-type developing device.
The automatic conveyance development device "ACT-300A2S" is a machine that performs spray development while rotating substrates up to 6 inches in size. It is equipped with two systems for developing solution, one system for rinsing, and an air knife, allowing recipe settings to be operated via a touch panel, enabling automatic development processing of up to 25 sheets. *There is also a sheet-type model available without automatic processing. 【Main Specifications】 ○ Processing Capacity: Capable of continuous processing of up to 25 round substrates of 6 inches ○ Process: Developing solution: 2 systems, Rinsing: 1 system, Air knife: 1 system ○ Chemicals Used: Alkaline developing solution, Deionized cleaning water For more details, please contact us or download the catalog.
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basic information
Processing capacity: Maximum 6-inch round substrates, 25 pieces (dedicated cassette storage) Process: Developer solution, 2 systems (nozzle interchangeable) Rinse, 1 system, air knife 1 system Chemicals used: Alkaline developer solution, deionized cleaning water Transport robot: Manufactured by Tatsumo, substrate positioning accuracy achieved through centering stage Recipe: 10 steps x 50 patterns can be registered Processing time setting: In units of 0.1 seconds Substrate rotation speed: AC servo motor control, 0 to 3000 rpm, accuracy within ±2 rpm Device size: W1120 x D920 x H1950 mm or less, under 500 kg Control system: 8-inch touch panel operation Suction table: White Teflon, vacuum hole suction type Canister: Capacity of 18 L, placed separately from the main unit, residual liquid amount detected by load cell Developer solution control temperature: 20 to 30°C ±3°C Utility: Three-phase 200V/30A, leakage breaker, 1 system Built-in vacuum pump Air: 0.5 MPa Nitrogen: 0.3 MPa Exhaust: Exhaust port φ75 mm, 2 systems (electrical exhaust, cup exhaust) Developer solution waste: Collected in a poly tank or connected to factory waste disposal
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Company information
Since our establishment in 1972, we have supported engineers and researchers involved in displays. We manufacture and sell various glass substrates and world-standard EHC cells both domestically and internationally, which are the core of our business. In recent years, there has been a growing demand for diverse metal deposition substrates and high-definition patterned glass substrates. As peripheral equipment, we provide custom small LCD panel assembly systems and wet process equipment, as well as dedicated systems for measuring and inspecting organic EL and organic solar cells, including simple jigs and more.
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