Study on the decomposition using hydrofluoric acid and nitric acid in the analysis of impurities in silicon.
Minimize exposure to hydrofluoric acid gas for people and improve the working environment! Also contributes to reducing working hours.
This technical document discusses the automatic pretreatment using hydrofluoric acid and nitric acid for the silicon decomposition (melting) of semiconductor materials and other raw materials, utilizing the automatic pretreatment device "DEENA" with acid addition and other processes controlled by a PC. When analyzing the silicon (metallic silicon, Si) content and impurities in semiconductor materials, hydrofluoric acid is often used. However, hydrofluoric acid is highly reactive with silicon, requiring careful addition in very small amounts, as this process generates a significant amount of hydrofluoric gas, necessitating precautions against human exposure. Therefore, we examined the automatic pretreatment using hydrofluoric acid and nitric acid for the silicon decomposition (melting) of semiconductor materials and other raw materials with DEENA, which can perform tasks such as acid addition, stirring, and measurement automatically under PC control. [Contents] ■ Purpose ■ Overview ■ Reagents Used ■ Analysis Flow, etc. *For more details, please refer to the PDF document or feel free to contact us.
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【Basic Performance of the Device】 ＜DEENA60 Main Unit＞ ■ Automatic addition of reagents (up to 8 types of reagents can be installed) ■ Stirring with a shaker ■ Heating with a hot plate ■ Cooling ■ Automatic addition of internal standard solutions and standards ■ Meniscus adjustment using an ultrasonic height sensor *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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The auto-analyzer developed by the former Technicon Corporation, a global pioneer in continuous flow analysis devices, is still widely used in analytical laboratories around the world today. In Japan, it continues to operate as an essential device in national and public research institutes, testing laboratories, and corporate factories and testing facilities. Our company, BL Tech Co., Ltd., has inherited approximately 40 years of auto-analyzer business in Japan and is committed to developing and manufacturing optimal continuous flow analysis devices to meet the current hot demand.