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  6. Decompression drying device "VD-400"

Decompression drying device "VD-400"

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last updated:Jun 11, 2025

イーエッチシー
イーエッチシー
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Drying is performed with a two-stage exhaust to suppress wind patterns and foaming.

The "VD-400" is a vacuum chamber designed for vacuum drying glass substrates after resist coating. It features a butterfly valve that allows for the adjustment of vacuum exhaust capacity. 【Main Specifications】 〇 Chamber: External dimensions 400mm x 400mm, height 103mm (when lid is closed) Internal dimensions 350mm x 350mm, height 30mm 〇 Vacuum system: Achievable vacuum level below 1Pa (without sample) Dry pump 250L/min For more details, please contact us or download the catalog.

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減圧乾燥装置DV-400.jpg

Decompression drying device "VD-400"

減圧乾燥装置DV-400.jpg
減圧乾燥装置DV-400.jpg
  • Related Link - http://www.jehc.co.jp/

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basic information

【Specifications】 〇Chamber: External dimensions 400mm x 400mm, height 103mm (when lid is closed) Internal dimensions 350mm x 350mm, height 30mm 〇Vacuum system: Achievable vacuum level below 1Pa (without sample) Dry pump 250L/min 〇Decompression method: Pressure mode - automatically releases to atmosphere when the set pressure is reached Time mode - automatically releases after decompression for the set time 〇Utilities: 3Φ AC200: Dry air 0.4–0.6MPa: Vacuum exhaust 〇External dimensions: (W) 1000 x (L) 800 mm x (H) 1600 mm 〇Device weight: Approximately 250 kg *The above items can be changed according to the required specifications. ●For more details, please contact us or download the catalog.

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イーエッチシー

イーエッチシー

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Since our establishment in 1972, we have supported engineers and researchers involved in displays. We manufacture and sell various glass substrates and world-standard EHC cells both domestically and internationally, which are the core of our business. In recent years, there has been a growing demand for diverse metal deposition substrates and high-definition patterned glass substrates. As peripheral equipment, we provide custom small LCD panel assembly systems and wet process equipment, as well as dedicated systems for measuring and inspecting organic EL and organic solar cells, including simple jigs and more.

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