Ultra-high purity diaphragm valve. Capable of approximately 100 million open/close cycles under atomic layer deposition (ALD) and high-speed switching (less than 5ms) applications (under our testing conditions).
The Ultra Fast Series is designed for high-purity processes that require high-speed opening and closing at high temperatures, operating continuously under precisely the same conditions, as exemplified by atomic layer deposition (ALD processes). It employs a unique flow control mechanism (patent pending US61/910,079) that allows for fine adjustments to maintain accurate flow rates during use. <Features> - High-speed valve opening and closing (valve response time: less than 5 ms) - Ultra-long lifespan (passed 100 million opening and closing tests) - Pressure resistance: Vacuum to 1 MPa (150 psi) - Body material: SS316L VAR or VIM/VAR (compliant with SEMI F20-0305) - Operating temperature range: -10 to 120°C (standard bonnet) -10 to 200°C (extended bonnet) - Sizes: 1/4", 1/2" - Surface finish (average): 5 microinches - Valve types: 2-port, 3-port, 4-port - Optional thermocouple and heater cartridge hole processing available - Optional solenoid valve and limit switch compatibility *For more details, please download the PDF or feel free to contact us.
Inquire About This Product
basic information
For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
Applications of Atomic Layer Deposition (ALD)
catalog（1）
Download All Catalogs
Company information
Ham-Let, headquartered in Israel, has local subsidiaries in the United States, Canada, the United Kingdom, Germany, France, the Netherlands, Russia, Singapore, and Japan. The company specializes in fittings, process valves, manifolds, ultra-clean diaphragm valves, high-purity fittings, pressure gauges, flexible hoses, filters, relief valves, sampling cylinders, flanges, and more, serving various industries such as energy, oil, gas, turbines, chemicals, petrochemicals, natural gas, electronics, and analysis. It is a global company that actively promotes M&A around the world to increase its workforce and expand its business. Ham-Let Motoyama Japan, the Japanese branch, primarily develops its business in the electronics sector through direct sales and approximately 60 agents and distributors established nationwide. The company's flagship products for the electronics sector, ultra-clean diaphragm valves and high-purity fittings, are supplied from the headquarters factory in Israel via air freight twice a week, ensuring supply and inventory levels, and are shipped daily nationwide from the logistics center in Tokyo. In recent years, the company has been focusing more on general industry and plant engineering by leveraging the resources of its group companies.
