Achieving slim design with the same performance as conventional products! Pneumatic active vibration isolation unit.
The active vibration isolation unit "VAAV-H" is equipped with a dedicated ultra-sensitive accelerometer for VAAV. It accurately detects extremely small vibrations. Using a unique active vibration isolation algorithm, it performs high-speed calculations and instantly cancels out vibrations with a high-precision, high-output actuator. Additionally, ultra-sensitive accelerometers are generously deployed on the floor side, achieving world-class vibration isolation performance through feedforward control. 【Features】 ○ Maintains the same performance as the VAAV-A series while keeping the overall height of the device low. ○ High-precision control of displacement and position in all directions is possible through pneumatic control. ○ Capable of selecting high-flow valves with fast response to accommodate large moving loads. ○ Safe and secure design compliant with CE marking (Controller SAC-07). ○ Standard features include stage feedforward functionality and vibration waveform display analysis software. For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○ Control Degrees of Freedom: 3 axes, 6 degrees of freedom ○ Position Accuracy: ±10μm ○ Required Air Source: 0.6MPa or higher (Clean Air) ○ Required Power Supply: AC 100V–240V, 100VA (Single Phase) ○ Control Method: Acceleration feedback, floor feedforward ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Semiconductor manufacturing and inspection equipment ○ LCD manufacturing and inspection equipment ○ Ultra-precision machine tools ● For more details, please contact us or download the catalog.
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Company information
Showa Science is a company that was established in 1974 with the aim of providing a technology called "vibration isolation," which eliminates vibration disturbances that future ultra-precision instruments may experience from their installation environment, along with vibration isolation systems utilizing this technology. Since its founding, the company has expanded its activities, supported by various customers and market needs, while keeping pace with the growth of the semiconductor industry both domestically and internationally. Currently, it has broadened its scope to include vibration isolation system business, architectural vibration control construction business, architectural equipment vibration control business, marine vibration control construction business, inspection equipment business, and optical and precision equipment business. For vibration isolation tables, vibration control tables, air springs, and soundproof boxes, trust Showa Science.
![[Example] Active Vibration Isolation Measures for LCD Substrate Inspection Equipment](https://image.www.ipros.com/public/product/image/875/2000687223/IPROS20629238516810340635.png?w=280&h=280)
