It is effective in microscopes that dislike low-frequency vibrations that cannot be completely eliminated by passive vibration isolation tables. It can be used with just a small compressor and power supply.
The Linear Active Vibration Isolation Unit "VAAV-S" uses a unique active vibration isolation algorithm for high-speed calculations, and instantly cancels vibrations with a super-fast response linear actuator and ultra-sensitive velocity sensors that do not use air. Since only air springs are used for load support, it can provide world-class vibration isolation performance through floor feed-forward control using ultra-sensitive velocity sensors deployed on the floor, as long as there is a small compressor and power supply. 【Features】 ○ Excellent responsiveness ○ Minimal air source required ○ High cost performance For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○ Control Degrees of Freedom: 3 axes, 6 degrees of freedom ○ Position Accuracy: ±1000μm ○ Required Air Source: 0.5MPa or more, consumption flow rate equivalent to passive ○ Required Power Supply: AC 100V–240V (50/60Hz), 200W ○ Control Method: Speed feedback, floor feedforward ○ Maximum Thrust: Horizontal: 20N, Vertical: 40N Note: When used as 4 units per platform ○ Generated Magnetic Field: 0.04μT or less Note: AC magnetic field at a position 150mm away from the unit ● For more details, please contact us or download the catalog.
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Applications/Examples of results
【Applications】 ○ Electron microscope ○ Scanning tunneling microscope, atomic force microscope, and optical measurement devices ○ Vibration isolation measures for installation floors with significant low-frequency vibrations ● For more details, please contact us or download the catalog.
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Company information
Showa Science is a company that was established in 1974 with the aim of providing a technology called "vibration isolation," which eliminates vibration disturbances that future ultra-precision instruments may experience from their installation environment, along with vibration isolation systems utilizing this technology. Since its founding, the company has expanded its activities, supported by various customers and market needs, while keeping pace with the growth of the semiconductor industry both domestically and internationally. Currently, it has broadened its scope to include vibration isolation system business, architectural vibration control construction business, architectural equipment vibration control business, marine vibration control construction business, inspection equipment business, and optical and precision equipment business. For vibration isolation tables, vibration control tables, air springs, and soundproof boxes, trust Showa Science.