Chemical filters that protect lenses from various pollutants and further extend their lifespan.
The "RisoGuard LPS Filter" is a cabinet-type chemical filter that enhances the removal performance of the current class-leading "RisoGuard BSMmax Filter" and achieves further longevity. It protects wafers and lenses from contamination by various pollutants, maximizing their lifespan. It is ideal for removing contaminants from the air supplied to semiconductor manufacturing equipment as well as to facilities and areas that require ultra-clean environments. 【Features】 ■ Usable for the removal of various pollutants: - Acidic gases (SO2, HCl, HBr) - Basic gases (NH3, NMP, amines) - Condensable organic gases (HMDSO, TMS) ■ Achieves increased adsorption capacity while maintaining the same size as the RisoGuard BSMmax Filter ■ Can be replaced with the RisoGuard BSMmax Filter ■ Filter reuse is possible through the Refill Program ■ Global sales and service system For more details, please contact us or download the catalog.
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basic information
【Specifications】 ○P515501 P515502 ・Applicable filter system: Risoguard-12 ・Outline dimensions (width × height × depth): 555 x 430 x 188 mm ・Set airflow: 433 ㎥/hr ・Maximum pressure loss: 265 Pa ・Approximate weight: 20kg For more details, please contact us or download the catalog.
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As a filter for removing chemical contaminants, it is ideal for the removal of various pollutants in the air supplied to equipment and areas that require ultra-clean environments, including semiconductor manufacturing equipment. For more details, please contact us or download the catalog.
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Company information
Founded in the United States in 1915, Donaldson has built a solid track record and gained trust as a global manufacturer of filtration solutions for over 100 years. Starting with engine filters for agricultural machinery, Donaldson products offer a wide range of filtration solutions, from large filtration systems for gas turbine equipment to ultra-fine filters and membranes for cutting-edge electronic devices. Donaldson Japan has established a manufacturing plant and technical center in the country, leveraging its long-standing filter technology to develop products suited to the Japanese market and provide support for customers' global expansion. Moving forward, we will continue to lead the industry as a pioneer in filtration technology.